JPS6276532U - - Google Patents

Info

Publication number

JPS6276532U

JPS6276532U JP16878085U JP16878085U JPS6276532U JP S6276532 U JPS6276532 U JP S6276532U JP 16878085 U JP16878085 U JP 16878085U JP 16878085 U JP16878085 U JP 16878085U JP S6276532 U JPS6276532 U JP S6276532U

Authority

JP

Japan

Prior art keywords

quartz

etching

chamber

plasma

gas

Prior art date

1985-11-01

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000010453 quartz Substances 0.000 claims description 6
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
• 238000005530 etching Methods 0.000 claims 2
• 238000001020 plasma etching Methods 0.000 claims 1