JPS6276531U - - Google Patents
Info
- Publication number
- JPS6276531U JPS6276531U JP16877985U JP16877985U JPS6276531U JP S6276531 U JPS6276531 U JP S6276531U JP 16877985 U JP16877985 U JP 16877985U JP 16877985 U JP16877985 U JP 16877985U JP S6276531 U JPS6276531 U JP S6276531U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- cooling
- cooling medium
- jig
- mounting surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002826 coolant Substances 0.000 claims 3
- 238000001816 cooling Methods 0.000 claims 3
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16877985U JPS6276531U (ru) | 1985-11-01 | 1985-11-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16877985U JPS6276531U (ru) | 1985-11-01 | 1985-11-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6276531U true JPS6276531U (ru) | 1987-05-16 |
Family
ID=31101969
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16877985U Pending JPS6276531U (ru) | 1985-11-01 | 1985-11-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6276531U (ru) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111810457A (zh) * | 2020-08-11 | 2020-10-23 | 芜湖新兴铸管有限责任公司 | 离心空压机空冷器降温水路装置 |
-
1985
- 1985-11-01 JP JP16877985U patent/JPS6276531U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111810457A (zh) * | 2020-08-11 | 2020-10-23 | 芜湖新兴铸管有限责任公司 | 离心空压机空冷器降温水路装置 |