JPS6275919A - Thin film magnetic head - Google Patents

Abstract

PURPOSE:To minimize the magnetic film removing quantity by a diamond byte and to form a highly accurate gap by forming a front gap part slope of the magnetic film and a rear gap part slope by the prescribed conditions on a non-magnetic substrate. CONSTITUTION:Magnetic films 3 and 3' are formed in an L-shaped way on a non-magnetic substrate 2. At such a time, angles alpha and alpha', in which rear gap part slopes 3r and 3'r are the normal line of the substrate 2, are theta<alpha, theta'<alpha' to azimuth angles theta and theta'. Next, a part of the magnetic films 3 and 3' is removed by a diamond byte and front gap part slopes 3f and 3'f are formed. The angles theta and theta, in which the slopes 3f and 3'f are the normal line of the substrate 2, are equivalent to the azimuth angles. Next, after a non-magnetic gap spacer 10 is adhered and formed on slopes 3f, 3r; 3'f, 3'r, a magnetic film 4 is adhered. The magnetic film 4 is lapped and removed until the film is equal to the magnetic films 3 and 3', and the winding is provided.

Description

[Detailed Description of the Invention] [Field of Application of the Invention] The present invention relates to a thin film hunting head, and particularly to a thin film hunting head suitable for use in a VTR or the like.

[Background of the invention]: 1 Gap linearity is important in manufacturing magnetic heads. Conventional bulk type hunting head (
For example, in Japanese Unexamined Patent Publication No. 59-155622, the individual core blocks are mechanically
1: A configuration in which an operating gap is obtained by bonding,
Therefore, the working gap length is affected by the condition of the bonding surface. There were problems such as the inability to achieve bonding accuracy. On the other hand, with thin-film magnetic heads, there is no bonding work that directly affects the gap and its accuracy, and since the a-score is formed by repeatedly depositing a thin film on a common non-emissive substrate, the dimensional accuracy of the track width is also poor. Significantly improved. Regarding the gap formation of thin film magnetic heads, using a diamond cutting tool etc.,
A desired azimuth is obtained by cutting the core along the entire length of the chip as described in Japanese Patent Application No. 12119, or by cutting a part of the core and pattern material together and cutting the entire length of the chip as described in JP-A-60-87416. Methods of forming angled gaps are known. This gap surface forming method using a diamond tool is a very effective means of transferring the diamond tool ridgeline directly onto the gap surface by moving the diamond tool in the film thickness direction and obtaining a high-precision gap surface. The reality is that tool wear is unavoidable even when using a diamond tool with a higher hardness than thin-film Yahaturn material. (reactive wear in the microscopic range) is severe, causing new problems other than those caused by gap bonding in terms of tool life, deterioration of gap linearity, roughness of the gap surface, dimensional accuracy, mass productivity, etc. arise.

In addition, since a steep slope is formed at the complementary angle of the azimuth angle with respect to the entire chip length Kh and the non-magnetic substrate, the so-called step coverage of depositing the magnetic film on this slope is not good. The magnetic film deterioration region was wide, resulting in a decrease in output.

[Purpose of the invention]

An object of the present invention is to provide a thin film hunting head and a method for manufacturing the same, which have a head structure that minimizes diamond bite wear and S film deterioration area, and which has a high precision gap performance and excellent productivity. The purpose is to improve the life of the bite.

[Summary of the invention]

The present invention is based on the fact that the wear amount of the cutting tool is approximately proportional to the net machining length, and that the step coverage of the slope formed by cutting the cutting tool 1r etc. is smaller as the angle between the non-magnetic surface and the slope is smaller. Focusing on the fact that the gentler the slope is, the better it is, and with regard to the slopes of the front gap portion and the slopes of the gap portion of the first magnetic film formed on the non-magnetic substrate, (1) Each slope is aligned with the normal line to the non-magnetic substrate. When the angles are ``■'' and ``A'', respectively, let A be ``■''. Regarding the line of intersection with , the latter line of intersection overlaps with the former line of intersection, or the latter line of intersection is shifted in the direction of measuring A.

[Embodiments of the invention]

Embodiments of the present invention will be described below with reference to FIG.

In FIG. 1 (α), the thin film hunting head 1 has a second magnetic film 4 formed between two first magnetic films 3 and 3' formed on a non-extracting substrate 2 with an operating gap of 5°5. ′ is narrowed. 6 is a non-magnetic substrate or 8i02. A protective material made of a non-magnetic film such as forsterite is used to protect the head.

7 is a winding window penetrating vertically, and the coil/I/8 is wound therein. FIG. 1(N) is a view of FIG. 1(α) viewed from the direction of the arrow, and is drawn with the protective material 7 omitted for convenience. A rear gap 9.9' is arranged on the outer side of the head from an extension of the operating gap 5.5' of the front section.

Next, the manufacturing process of the thin film magnetic head shown in FIG. 1 will be explained using FIGS. 2(,) to (/-). As shown in FIG. 2(α), a first magnetic film 3. of sendust, permalloy, amorphous, etc. is deposited on a non-magnetic substrate such as glass ceramic.
3' is formed into an L-shape by sputtering or the like. Alternatively, this shape may be formed by sputtering a magnetic film on the entire surface of a non-magnetic substrate and then performing mask milling every time.

In this λLL-shaped S-type film, the angles a and α' between the slopes 3 r and 3' r of the rear portions and the normal line of the non-magnetic substrate 2 are as follows with respect to the azimuth angles θ and θ', which will be described later. θ (11, θ′ × α′. First S film 3°6
The reason why ′ is formed in an L-shape with θ and α and θ′ and α′ is to limit the magnetic film area that the cutting tool comes into contact with during gap machining with a diamond cutting tool, which will be described later, to only the slope of the front gap, and otherwise In order to prevent cutting due to γC, that is, to minimize the amount of S film removed by the cutting tool, and to improve step coverage when forming the second magnetic film on this slope, which will also be described later. It is. Next, as shown in the same figure (ne), the first S
A part of the magnetic film 3.6' is removed using a diamond cutting tool, and the front gap slopes sf and 3'f, which will become the front gap, are formed in the subsequent steps. This front gap f[F) surface 3f.

The angles θ and θ' that 5'f makes with the normal line of the non-magnetic substrate 2 correspond to the azimuth angles (however, as mentioned above, θ, a, θ'
((1'). The magnetic film removal processing distance in this process is shortened to about 1/20 compared to the conventional case of processing from the front gap part to the rear gap part, and Since no cutting is performed with the cutting tool, tool wear is reduced and the tool life is improved.Next, as shown in FIG.
.

5r; After being deposited on 3'f and 3'r, a second S film 4 is deposited by a method such as sputtering. Note that the nonmagnetic gap spacer 10, such as 5in2, may be formed not only on the slope of the gear part, but also on the surface of the first S film S, 3'. In the present invention, θ<
Since a, θ'<α', in so-called step coverage in which the second S film 4 is deposited on the first S film 3.3', only the slope of the fluff part of the front panel 9 is a step with a steep angle. Coverage, and the rear gap throat surface has a gentle step coverage, so you can expect improved head performance. Next, as shown in FIG. 1 (, 1), the second S film 4 is removed by lapping until it is flush with the first magnetic film 6.3'. Furthermore, as shown in FIG. 4(4), a winding window 7 is formed by ion milling or the like. Thereafter, by forming a protective material, grinding, and winding, the thin film magnetic head shown in FIG. 1 can be manufactured.

By applying this example and minimizing the amount of $-type film removed by cutting with a cutting tool and improving the step coverage of the S-type film, a high-precision gap can be obtained. Part-time job life is about 4
Improved by 0 times. There were effects such as an improvement in performance of about 2 df3.

In the above embodiment, as shown in Fig. 2 U), regarding the intersection line of the front gap part slope, the rear gap throat surface, and the non-magnetic substrate, the latter intersection line is on the side in the direction of measuring ■ and A than the former intersection line. However, as shown in FIG. 3, even if the lines of intersection of the two overlap, the effect of the present invention does not change.

The above embodiment describes a double azimuth thin film magnetic head having two operating gears on one chip, but it is not limited to this and can be applied to scene angle azimuth thin film hunting, and the above effects can be achieved. It goes without saying that there is.

Also, although one or more embodiments are all embodiments of a single head, the invention can also be extended to wafers.

〔Effect of the invention〕

1. As explained above, according to the present invention, the amount of S film removed by the diamond cutting tool can be minimized and good step coverage can be obtained, so that a gap can be formed with high precision. Improves bite life. This has effects such as improved performance.

[Brief explanation of drawings]

1゛1")"'z*a""-1"ゝThin film 8ki-7)"1
7): Perspective view, Figure 1 (8) is its plan view,
FIG. 2 is an explanatory diagram of the manufacturing process of a thin film magnetic head according to one embodiment of the present invention, and FIG. 6 shows another embodiment of the present invention.
It is a perspective view. 1... thin film magnetic head, 2... non-extractable substrate, 3.6'... first abrasive film, 4...
...Second output film, 5.5'...Operation gap, 6...Protective material, 7...Winding window, 8...・・Coil, 9.9′・・・・
...Rear gap, 10...Gap spacer.

Claims (1)

[Scope of Claims] 1. A magnetic material serving as a core material and a non-magnetic material serving as an operating gap are deposited and formed on a non-magnetic substrate by a predetermined process, and a part of the magnetic material and a portion of the non-magnetic material are included. In a thin film magnetic head in which a winding window passing through a non-magnetic substrate is provided, and a magnetic circuit is formed by a magnetic material and a non-magnetic material around the winding window, a rear gap portion slope (i.e., a final The slope of the front gap (i.e., the gap from the head sliding surface to the winding hole in the final head shape) Let A and ■ be the angles each of these make with the normal line erected on the non-magnetic substrate, respectively, then ■<A, that is, the inclination of the slope of the rear gap portion with respect to the non-magnetic substrate is the front gap with respect to it. A thin film magnetic head characterized in that the slope of the part surface is increased. 2. In the thin film magnetic head according to claim 1, with respect to two lines of intersection formed by the rear gap slope and the front gap slope intersecting with the non-magnetic substrate, the former line of intersection is the same as that of the latter. A thin film magnetic head characterized in that it overlaps with the intersection line or is shifted in the direction of measuring the above-mentioned A and (2).