JPS6275405U - - Google Patents
Info
- Publication number
- JPS6275405U JPS6275405U JP16693585U JP16693585U JPS6275405U JP S6275405 U JPS6275405 U JP S6275405U JP 16693585 U JP16693585 U JP 16693585U JP 16693585 U JP16693585 U JP 16693585U JP S6275405 U JPS6275405 U JP S6275405U
- Authority
- JP
- Japan
- Prior art keywords
- actuator
- rod
- displacement
- detection device
- movable rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006073 displacement reaction Methods 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 3
- 239000012530 fluid Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000012212 insulator Substances 0.000 description 1
Landscapes
- Actuator (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985166935U JPH0720562Y2 (ja) | 1985-10-30 | 1985-10-30 | アクチュエータ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985166935U JPH0720562Y2 (ja) | 1985-10-30 | 1985-10-30 | アクチュエータ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6275405U true JPS6275405U (US07860544-20101228-C00003.png) | 1987-05-14 |
JPH0720562Y2 JPH0720562Y2 (ja) | 1995-05-15 |
Family
ID=31098388
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1985166935U Expired - Lifetime JPH0720562Y2 (ja) | 1985-10-30 | 1985-10-30 | アクチュエータ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0720562Y2 (US07860544-20101228-C00003.png) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02173484A (ja) * | 1988-12-26 | 1990-07-04 | Toto Ltd | 位置検出機能を有する圧電アクチュエータ |
JP2010240833A (ja) * | 2009-03-18 | 2010-10-28 | Kobayashi Co Ltd | 計測機能付きチャック装置及びロボットチャック装置 |
JP2012030299A (ja) * | 2010-07-29 | 2012-02-16 | Kobayashi Co Ltd | 計測機能付きチャック装置及びロボットチャック装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53131858A (en) * | 1977-04-20 | 1978-11-17 | Meyer Hans Ulrich | Measuring apparatus of length |
JPS578909U (US07860544-20101228-C00003.png) * | 1980-06-18 | 1982-01-18 | ||
JPS5945505U (ja) * | 1982-09-17 | 1984-03-26 | 株式会社小松製作所 | シリンダストロ−ク検出装置 |
JPS604803A (ja) * | 1983-06-15 | 1985-01-11 | ボ−ゲ・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツンク | ピストンの行程調整装置 |
-
1985
- 1985-10-30 JP JP1985166935U patent/JPH0720562Y2/ja not_active Expired - Lifetime
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53131858A (en) * | 1977-04-20 | 1978-11-17 | Meyer Hans Ulrich | Measuring apparatus of length |
JPS578909U (US07860544-20101228-C00003.png) * | 1980-06-18 | 1982-01-18 | ||
JPS5945505U (ja) * | 1982-09-17 | 1984-03-26 | 株式会社小松製作所 | シリンダストロ−ク検出装置 |
JPS604803A (ja) * | 1983-06-15 | 1985-01-11 | ボ−ゲ・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツンク | ピストンの行程調整装置 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02173484A (ja) * | 1988-12-26 | 1990-07-04 | Toto Ltd | 位置検出機能を有する圧電アクチュエータ |
JP2010240833A (ja) * | 2009-03-18 | 2010-10-28 | Kobayashi Co Ltd | 計測機能付きチャック装置及びロボットチャック装置 |
JP2012030299A (ja) * | 2010-07-29 | 2012-02-16 | Kobayashi Co Ltd | 計測機能付きチャック装置及びロボットチャック装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0720562Y2 (ja) | 1995-05-15 |