JPS6275405U - - Google Patents

Info

Publication number
JPS6275405U
JPS6275405U JP16693585U JP16693585U JPS6275405U JP S6275405 U JPS6275405 U JP S6275405U JP 16693585 U JP16693585 U JP 16693585U JP 16693585 U JP16693585 U JP 16693585U JP S6275405 U JPS6275405 U JP S6275405U
Authority
JP
Japan
Prior art keywords
actuator
rod
displacement
detection device
movable rod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16693585U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0720562Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985166935U priority Critical patent/JPH0720562Y2/ja
Publication of JPS6275405U publication Critical patent/JPS6275405U/ja
Application granted granted Critical
Publication of JPH0720562Y2 publication Critical patent/JPH0720562Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Actuator (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
JP1985166935U 1985-10-30 1985-10-30 アクチュエータ Expired - Lifetime JPH0720562Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985166935U JPH0720562Y2 (ja) 1985-10-30 1985-10-30 アクチュエータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985166935U JPH0720562Y2 (ja) 1985-10-30 1985-10-30 アクチュエータ

Publications (2)

Publication Number Publication Date
JPS6275405U true JPS6275405U (US07860544-20101228-C00003.png) 1987-05-14
JPH0720562Y2 JPH0720562Y2 (ja) 1995-05-15

Family

ID=31098388

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985166935U Expired - Lifetime JPH0720562Y2 (ja) 1985-10-30 1985-10-30 アクチュエータ

Country Status (1)

Country Link
JP (1) JPH0720562Y2 (US07860544-20101228-C00003.png)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02173484A (ja) * 1988-12-26 1990-07-04 Toto Ltd 位置検出機能を有する圧電アクチュエータ
JP2010240833A (ja) * 2009-03-18 2010-10-28 Kobayashi Co Ltd 計測機能付きチャック装置及びロボットチャック装置
JP2012030299A (ja) * 2010-07-29 2012-02-16 Kobayashi Co Ltd 計測機能付きチャック装置及びロボットチャック装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53131858A (en) * 1977-04-20 1978-11-17 Meyer Hans Ulrich Measuring apparatus of length
JPS578909U (US07860544-20101228-C00003.png) * 1980-06-18 1982-01-18
JPS5945505U (ja) * 1982-09-17 1984-03-26 株式会社小松製作所 シリンダストロ−ク検出装置
JPS604803A (ja) * 1983-06-15 1985-01-11 ボ−ゲ・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツンク ピストンの行程調整装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53131858A (en) * 1977-04-20 1978-11-17 Meyer Hans Ulrich Measuring apparatus of length
JPS578909U (US07860544-20101228-C00003.png) * 1980-06-18 1982-01-18
JPS5945505U (ja) * 1982-09-17 1984-03-26 株式会社小松製作所 シリンダストロ−ク検出装置
JPS604803A (ja) * 1983-06-15 1985-01-11 ボ−ゲ・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツンク ピストンの行程調整装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02173484A (ja) * 1988-12-26 1990-07-04 Toto Ltd 位置検出機能を有する圧電アクチュエータ
JP2010240833A (ja) * 2009-03-18 2010-10-28 Kobayashi Co Ltd 計測機能付きチャック装置及びロボットチャック装置
JP2012030299A (ja) * 2010-07-29 2012-02-16 Kobayashi Co Ltd 計測機能付きチャック装置及びロボットチャック装置

Also Published As

Publication number Publication date
JPH0720562Y2 (ja) 1995-05-15

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