JPS6273539U - - Google Patents
Info
- Publication number
- JPS6273539U JPS6273539U JP16280485U JP16280485U JPS6273539U JP S6273539 U JPS6273539 U JP S6273539U JP 16280485 U JP16280485 U JP 16280485U JP 16280485 U JP16280485 U JP 16280485U JP S6273539 U JPS6273539 U JP S6273539U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- moving table
- electron beam
- moving
- sample holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16280485U JPS6273539U (enExample) | 1985-10-25 | 1985-10-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16280485U JPS6273539U (enExample) | 1985-10-25 | 1985-10-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6273539U true JPS6273539U (enExample) | 1987-05-11 |
Family
ID=31090413
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16280485U Pending JPS6273539U (enExample) | 1985-10-25 | 1985-10-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6273539U (enExample) |
-
1985
- 1985-10-25 JP JP16280485U patent/JPS6273539U/ja active Pending
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