JPS6273537U - - Google Patents

Info

Publication number
JPS6273537U
JPS6273537U JP16644785U JP16644785U JPS6273537U JP S6273537 U JPS6273537 U JP S6273537U JP 16644785 U JP16644785 U JP 16644785U JP 16644785 U JP16644785 U JP 16644785U JP S6273537 U JPS6273537 U JP S6273537U
Authority
JP
Japan
Prior art keywords
tube
semiconductor device
device manufacturing
manufacturing according
cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16644785U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16644785U priority Critical patent/JPS6273537U/ja
Publication of JPS6273537U publication Critical patent/JPS6273537U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
JP16644785U 1985-10-28 1985-10-28 Pending JPS6273537U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16644785U JPS6273537U (enrdf_load_stackoverflow) 1985-10-28 1985-10-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16644785U JPS6273537U (enrdf_load_stackoverflow) 1985-10-28 1985-10-28

Publications (1)

Publication Number Publication Date
JPS6273537U true JPS6273537U (enrdf_load_stackoverflow) 1987-05-11

Family

ID=31097430

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16644785U Pending JPS6273537U (enrdf_load_stackoverflow) 1985-10-28 1985-10-28

Country Status (1)

Country Link
JP (1) JPS6273537U (enrdf_load_stackoverflow)

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