JPS6273537U - - Google Patents
Info
- Publication number
- JPS6273537U JPS6273537U JP16644785U JP16644785U JPS6273537U JP S6273537 U JPS6273537 U JP S6273537U JP 16644785 U JP16644785 U JP 16644785U JP 16644785 U JP16644785 U JP 16644785U JP S6273537 U JPS6273537 U JP S6273537U
- Authority
- JP
- Japan
- Prior art keywords
- tube
- semiconductor device
- device manufacturing
- manufacturing according
- cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 12
- 239000007788 liquid Substances 0.000 claims description 4
- 239000010453 quartz Substances 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims 10
- 239000004065 semiconductor Substances 0.000 claims 10
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims 2
- 239000007864 aqueous solution Substances 0.000 claims 1
- 238000009792 diffusion process Methods 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Cleaning In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16644785U JPS6273537U (OSRAM) | 1985-10-28 | 1985-10-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16644785U JPS6273537U (OSRAM) | 1985-10-28 | 1985-10-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6273537U true JPS6273537U (OSRAM) | 1987-05-11 |
Family
ID=31097430
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16644785U Pending JPS6273537U (OSRAM) | 1985-10-28 | 1985-10-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6273537U (OSRAM) |
-
1985
- 1985-10-28 JP JP16644785U patent/JPS6273537U/ja active Pending