JPS6273536U - - Google Patents
Info
- Publication number
- JPS6273536U JPS6273536U JP16317085U JP16317085U JPS6273536U JP S6273536 U JPS6273536 U JP S6273536U JP 16317085 U JP16317085 U JP 16317085U JP 16317085 U JP16317085 U JP 16317085U JP S6273536 U JPS6273536 U JP S6273536U
- Authority
- JP
- Japan
- Prior art keywords
- wafer holder
- longitudinal direction
- utility
- scope
- shape
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 description 2
- 239000003708 ampul Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16317085U JPS6273536U (sv) | 1985-10-24 | 1985-10-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16317085U JPS6273536U (sv) | 1985-10-24 | 1985-10-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6273536U true JPS6273536U (sv) | 1987-05-11 |
Family
ID=31091122
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16317085U Pending JPS6273536U (sv) | 1985-10-24 | 1985-10-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6273536U (sv) |
-
1985
- 1985-10-24 JP JP16317085U patent/JPS6273536U/ja active Pending