JPS6273532U - - Google Patents

Info

Publication number
JPS6273532U
JPS6273532U JP16323385U JP16323385U JPS6273532U JP S6273532 U JPS6273532 U JP S6273532U JP 16323385 U JP16323385 U JP 16323385U JP 16323385 U JP16323385 U JP 16323385U JP S6273532 U JPS6273532 U JP S6273532U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
orientation flat
mark
orientation
determining
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16323385U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16323385U priority Critical patent/JPS6273532U/ja
Publication of JPS6273532U publication Critical patent/JPS6273532U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP16323385U 1985-10-24 1985-10-24 Pending JPS6273532U (US20110009641A1-20110113-C00256.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16323385U JPS6273532U (US20110009641A1-20110113-C00256.png) 1985-10-24 1985-10-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16323385U JPS6273532U (US20110009641A1-20110113-C00256.png) 1985-10-24 1985-10-24

Publications (1)

Publication Number Publication Date
JPS6273532U true JPS6273532U (US20110009641A1-20110113-C00256.png) 1987-05-11

Family

ID=31091243

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16323385U Pending JPS6273532U (US20110009641A1-20110113-C00256.png) 1985-10-24 1985-10-24

Country Status (1)

Country Link
JP (1) JPS6273532U (US20110009641A1-20110113-C00256.png)

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