JPS6273257U - - Google Patents

Info

Publication number
JPS6273257U
JPS6273257U JP16442785U JP16442785U JPS6273257U JP S6273257 U JPS6273257 U JP S6273257U JP 16442785 U JP16442785 U JP 16442785U JP 16442785 U JP16442785 U JP 16442785U JP S6273257 U JPS6273257 U JP S6273257U
Authority
JP
Japan
Prior art keywords
light source
inspection
inspection object
illumination light
base illumination
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16442785U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16442785U priority Critical patent/JPS6273257U/ja
Publication of JPS6273257U publication Critical patent/JPS6273257U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP16442785U 1985-10-25 1985-10-25 Pending JPS6273257U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16442785U JPS6273257U (ko) 1985-10-25 1985-10-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16442785U JPS6273257U (ko) 1985-10-25 1985-10-25

Publications (1)

Publication Number Publication Date
JPS6273257U true JPS6273257U (ko) 1987-05-11

Family

ID=31093535

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16442785U Pending JPS6273257U (ko) 1985-10-25 1985-10-25

Country Status (1)

Country Link
JP (1) JPS6273257U (ko)

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