JPS6273241U - - Google Patents

Info

Publication number
JPS6273241U
JPS6273241U JP16301985U JP16301985U JPS6273241U JP S6273241 U JPS6273241 U JP S6273241U JP 16301985 U JP16301985 U JP 16301985U JP 16301985 U JP16301985 U JP 16301985U JP S6273241 U JPS6273241 U JP S6273241U
Authority
JP
Japan
Prior art keywords
encoders
pair
torque meter
calculates
displays
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16301985U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16301985U priority Critical patent/JPS6273241U/ja
Publication of JPS6273241U publication Critical patent/JPS6273241U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Force Measurement Appropriate To Specific Purposes (AREA)
JP16301985U 1985-10-25 1985-10-25 Pending JPS6273241U (Direct)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16301985U JPS6273241U (Direct) 1985-10-25 1985-10-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16301985U JPS6273241U (Direct) 1985-10-25 1985-10-25

Publications (1)

Publication Number Publication Date
JPS6273241U true JPS6273241U (Direct) 1987-05-11

Family

ID=31090834

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16301985U Pending JPS6273241U (Direct) 1985-10-25 1985-10-25

Country Status (1)

Country Link
JP (1) JPS6273241U (Direct)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07245262A (ja) * 1994-05-20 1995-09-19 Tokyo Electron Kyushu Kk アッシング方法及びアッシング装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6018734A (ja) * 1983-07-13 1985-01-30 Hitachi Ltd トルク検出器

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6018734A (ja) * 1983-07-13 1985-01-30 Hitachi Ltd トルク検出器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07245262A (ja) * 1994-05-20 1995-09-19 Tokyo Electron Kyushu Kk アッシング方法及びアッシング装置

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