JPS6271862U - - Google Patents

Info

Publication number
JPS6271862U
JPS6271862U JP16391785U JP16391785U JPS6271862U JP S6271862 U JPS6271862 U JP S6271862U JP 16391785 U JP16391785 U JP 16391785U JP 16391785 U JP16391785 U JP 16391785U JP S6271862 U JPS6271862 U JP S6271862U
Authority
JP
Japan
Prior art keywords
emitter
electron gun
generating holder
heat
heat generating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16391785U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16391785U priority Critical patent/JPS6271862U/ja
Publication of JPS6271862U publication Critical patent/JPS6271862U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
JP16391785U 1985-10-25 1985-10-25 Pending JPS6271862U (fi)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16391785U JPS6271862U (fi) 1985-10-25 1985-10-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16391785U JPS6271862U (fi) 1985-10-25 1985-10-25

Publications (1)

Publication Number Publication Date
JPS6271862U true JPS6271862U (fi) 1987-05-08

Family

ID=31092558

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16391785U Pending JPS6271862U (fi) 1985-10-25 1985-10-25

Country Status (1)

Country Link
JP (1) JPS6271862U (fi)

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