JPS6271099A - Semiconductor storage device - Google Patents

Semiconductor storage device

Info

Publication number
JPS6271099A
JPS6271099A JP60210413A JP21041385A JPS6271099A JP S6271099 A JPS6271099 A JP S6271099A JP 60210413 A JP60210413 A JP 60210413A JP 21041385 A JP21041385 A JP 21041385A JP S6271099 A JPS6271099 A JP S6271099A
Authority
JP
Japan
Prior art keywords
capacitor
writing
potential difference
word line
erasing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP60210413A
Other languages
Japanese (ja)
Inventor
Junichi Tsujimoto
辻本 順一
Hisahiro Matsukawa
尚弘 松川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP60210413A priority Critical patent/JPS6271099A/en
Publication of JPS6271099A publication Critical patent/JPS6271099A/en
Pending legal-status Critical Current

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  • Read Only Memory (AREA)

Abstract

PURPOSE:To extremely shorten a time required for erasing and writing the whole chips in an EEPROM by connecting a capacitor 12 between two terminals of an EEPROM cell to which a high voltage is applied at erasing/writing through a resistor. CONSTITUTION:A high voltage is applied between nodes 6, 7, a word line 5 is selected to charge the capacitor 12 electrically and to keep the potential difference between both the terminals of the capacitor 12, and then the word line 15 is closed. Since the resistor 11 exists, the potential difference between the drain 3 and the control gate 1 of a MOSFET is reduced less than the potential difference of the capacitor 12 by CR delay, so that a thin oxide passing a tunnel current can be prevented from the application of stress. The opening time of the word line 5 may be sufficiently satisfied with the charging time of the capacitor 12.

Description

【発明の詳細な説明】 〔発明の技術分野〕 本発明はEEPKOM (電気的に消去可能なEPRO
M)セルによる半導体記憶装置に関するもので、特にl
チップ全体を高速に書き込む場合に使用される鵬のであ
る。
DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to an EEPKOM (Electrically Erasable EPRO)
M) Concerning semiconductor memory devices using cells, especially l
Peng's is used when writing the entire chip at high speed.

〔発明の技術的背景とその問題点〕[Technical background of the invention and its problems]

一般に70−チイングf−)を使ったgli?ROMセ
ルにおいては、薄い酸化膜に高電圧を加えることによシ
、トンネル電流を流してセルの消去、書き込みを行なう
。しかしこの消去、書き込みにはamsの時間を要し、
また薄い酸化膜にストレスが加わることをさけることが
必要なため、高電圧を加える時には、ノ臂ルスの立ち上
がシ時間をあまシ急激なものにすることはできない。こ
れらのために、チップ全体を消去、書き込むのに要する
時間は長いものになっていた。
Generally using 70-chiing f-) gli? In a ROM cell, erasing and writing of the cell are performed by applying a high voltage to a thin oxide film to cause a tunnel current to flow. However, this erasing and writing takes ams of time.
Furthermore, since it is necessary to avoid applying stress to the thin oxide film, when applying a high voltage, the rise time of the arm cannot be made too rapid. For these reasons, it takes a long time to erase and write the entire chip.

第2図は上記事項を説明するための従来の1iiKFR
OMセルで、図中1はコントロールゲート、2は70−
テインググート、3はドレイン、4はセレクトダート、
5はワード線、6はピ、)線、7はノードである。この
EEPROMセルの消去、書き込み動作は、ワード線5
を選択し、セレクトゲート4を開けておいて、ノード6
と7の間に高電圧を加える。消去、書き込みには数ml
の時間が必要であるので、この間中ワード線5を選択し
ていなければならない。更にノード6と7の電位差が直
接ドレイン3とコントロールゲート1の電位差になるの
で、酸化膜にストレスを与えl!:いために、高電圧の
立ち上がりをなで、うせることが必要になる。
Figure 2 shows a conventional 1iiKFR to explain the above matters.
In the OM cell, 1 is the control gate and 2 is the 70-
Teinggut, 3 is Drain, 4 is Select Dart,
5 is a word line, 6 is a pin, ) line, and 7 is a node. Erasing and writing operations of this EEPROM cell are performed by the word line 5.
, leave select gate 4 open, and select node 6.
Apply high voltage between and 7. A few ml for erasing and writing
, the word line 5 must be selected during this time. Furthermore, since the potential difference between nodes 6 and 7 directly becomes the potential difference between drain 3 and control gate 1, stress is applied to the oxide film. :To prevent this, it is necessary to smooth out the rise of high voltage.

〔発明の目的〕[Purpose of the invention]

本発明は上記実情に鑑みてなされたもので、EEFRO
Mにおいてチ、f全体の消去、書き込みに要する時間を
非常に短くできる半導体記憶装置を採供しようとするも
のである。
The present invention was made in view of the above circumstances, and the EEFRO
The present invention aims to provide a semiconductor memory device that can extremely shorten the time required for erasing and writing the entirety of h and f in M.

〔発明の概要〕[Summary of the invention]

本発明は、フローティングゲートとコントロールゲート
を有するEEPROMセルにおいて、消去、書き込み時
に高電圧を加える2端子、即ちドレインとコントロール
クー)+7)間ニ、:lントロールグートには抵抗を介
して、容量を入れたことを′#徴としている。
In an EEPROM cell having a floating gate and a control gate, the present invention provides a capacitance between two terminals to which high voltage is applied during erasing and writing, that is, the drain and the control gate via a resistor. It is considered a sign that it has been inserted.

〔発■の実施例〕 以下図面を参照して本発明の一実施例を説明する。第1
図は同実施例のEEFROMセル回路図であるが、これ
は前記従来のものと対応させた場合の例であるから、対
応する個所には同一符号を付して説明を省略し、特徴と
する個所の説明を行なう。本実施例の特徴は、コントロ
ールゲート1の給電系銘に抵抗111に介挿し、この抵
抗11の一端とドレイン、セレクトゲート間との間に容
ij 2’i設けたことである。
[Embodiment 2] An embodiment of the present invention will be described below with reference to the drawings. 1st
The figure is an EEFROM cell circuit diagram of the same embodiment, but since this is an example in which it corresponds to the conventional one, corresponding parts are given the same reference numerals and explanations are omitted. Explain the parts. The feature of this embodiment is that a resistor 111 is inserted in the power supply system name of the control gate 1, and a capacitor 2'i is provided between one end of the resistor 11, the drain, and the select gate.

上記第1図の構成における消去、書き込み動作は、ノー
ド6と7の間に高電圧を加えておrて、ワード線5を選
択することによシ容’1klRを充寛し、容量120両
端子の電位差を高いものにした後に、ワード線15を閉
じる。しかして抵抗11があるためにドレイン3−とコ
ントロールゲート1の間の電位差は、容量12の電位差
よシCR遅延の分だけなまったものになt)、トンネル
電流を流す薄い酸化膜にストレスを加えることを避ける
ことができる。またワード@5を開けておく時間が、容
量12に充電する間だけでよくなるものである。
Erasing and writing operations in the configuration shown in FIG. After increasing the potential difference between the two terminals, the word line 15 is closed. However, due to the presence of the resistor 11, the potential difference between the drain 3- and the control gate 1 becomes more blunted by the CR delay than the potential difference of the capacitor 12 (t), which causes stress to the thin oxide film through which the tunnel current flows. You can avoid adding Also, the time it takes to keep Word@5 open is limited to the time it takes to charge the battery to capacity 12.

〔発明の効果〕〔Effect of the invention〕

以上説明し之如く本発明によれば、EEPROMセルに
消去、書き込みを行なう場合、ワード線を選択するのは
、容量に充電する間でよいので、チッグ全体を書き込む
時に非常に短い時間ですむ。また抵抗全般けたため、薄
い酸化膜に強いストレスをかけるのを避けることができ
るものである。
As described above, according to the present invention, when erasing or writing to an EEPROM cell, the word line can be selected while the capacitor is being charged, so it takes a very short time to write the entire chip. Furthermore, since the resistance is generally high, it is possible to avoid applying strong stress to the thin oxide film.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施伊Jを示す回路図、第2図は従
来のEEFROMセルの回路図である。 1・・・コントロールゲート、2・・・フローティング
ゲート、3・・・ドレイン、4・・・セレクトゲート、
5・・・ワー#9線、6・・・ピット線、11・・・抵
抗、12・・・容i:e 出願人代理人  弁理士 鈴 江 武 彦第1図 第2図
FIG. 1 is a circuit diagram showing one embodiment of the present invention, and FIG. 2 is a circuit diagram of a conventional EEFROM cell. 1... Control gate, 2... Floating gate, 3... Drain, 4... Select gate,
5...War #9 line, 6...Pit line, 11...Resistance, 12...I:e Applicant's agent Patent attorney Takehiko Suzue Figure 1 Figure 2

Claims (3)

【特許請求の範囲】[Claims] (1)消去、書き込み時に高電圧を加えるEEPROM
セルの2端子の間に、抵抗を通して容量を設けたことを
特徴とする半導体記憶装置。
(1) EEPROM that applies high voltage during erasing and writing
A semiconductor memory device characterized in that a capacitor is provided between two terminals of a cell through a resistor.
(2)前記2端子はセルのドレインとコントロールゲー
トであることを特徴とする特許請求の範囲第1項に記載
の半導体記憶装置。
(2) The semiconductor memory device according to claim 1, wherein the two terminals are a drain and a control gate of a cell.
(3)前記抵抗をEEPROMセルのコントロールゲー
トに接続したことを特徴とする特許請求の範囲第1項に
記載の半導体記憶装置。
(3) The semiconductor memory device according to claim 1, wherein the resistor is connected to a control gate of an EEPROM cell.
JP60210413A 1985-09-24 1985-09-24 Semiconductor storage device Pending JPS6271099A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60210413A JPS6271099A (en) 1985-09-24 1985-09-24 Semiconductor storage device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60210413A JPS6271099A (en) 1985-09-24 1985-09-24 Semiconductor storage device

Publications (1)

Publication Number Publication Date
JPS6271099A true JPS6271099A (en) 1987-04-01

Family

ID=16588902

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60210413A Pending JPS6271099A (en) 1985-09-24 1985-09-24 Semiconductor storage device

Country Status (1)

Country Link
JP (1) JPS6271099A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5970338A (en) * 1995-08-28 1999-10-19 Siemens Aktiengesellschaft Method of producing an EEPROM semiconductor structure

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5970338A (en) * 1995-08-28 1999-10-19 Siemens Aktiengesellschaft Method of producing an EEPROM semiconductor structure

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