JPS6270978A - Processing method for graphic data - Google Patents

Abstract

PURPOSE:To attain various applications to production of drawings, inspection of drawings, etc. just in a single style without having any complicated operation, by providing the attribute data to each of plural coordinates to show the characteristics of the relevant coordinates. CONSTITUTION:Each of plural coordinates has the attribute data showing the characteristics of the relevant coordinates. Then the attribute data is added to the data showing the coordinates for execution of the processing. In such a constitution, the attribute data is added to the coordinate data on each apex of the internal data with which the graphic arithmetic processing is through. Thus it is possible to describe the information to the attribute data to show the position at the outer or inner circumference of a plane pattern. That is, an internal data style IV is obtained just by giving the single data conversion III to each type of jobs after changing the data flow to the production II of basic data from a drawing I. Then the output V of each drawing and the inspection V' of drawings can be performed in the style IV.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a graphic data processing method. The present invention can be used, for example, in graphic processing in printed circuit board design and in a method for processing pattern data of photomasks used in semiconductor integrated circuits, and is a graphic description internal data format that is central to CAD systems for integrated circuit mask patterns. It can be embodied as

[Summary of the invention]

The present invention provides a graphic data processing method for processing the positional coordinates of a plurality of points constituting a predetermined figure. It is a single format that can be used for multiple purposes, such as drawing creation and graphic verification, without requiring any operations.

[Prior art and its problems]

In conventional technology of this type, for example, a normal CAD system, when various operations, such as drawing output and drawing verification, are performed from created basic data, respective internal data formats are required.

In other words, the data flow is as shown in Figure 5.Basic data creation is performed from drawing I, and in order to perform various operations from now on, data conversion m, If'L,
Obtain the internal data format TV, TV' and output each drawing ■
Alternatively, let it be drawing verification V'. However, when a plurality of internal data formats are required in this way, the work is complicated, there are many opportunities for work errors to occur, and work time is required, resulting in inefficiency.

Taking graphic creation as an example, it is as follows. The original data is as shown in Figures 6 and 8, the coordinates of each point (x+
, y+ ) Cxt , yz )−(x□.

given by yn). For example, information indicating that the figure is a rectangle can be added to this data.

If this original data remains as it is, the figure will be given by information connecting each point as shown in FIG. Therefore, data processing is performed to obtain intermediate data (FIG. 8), so that information close to the actual figure as shown in FIG. 7 can be obtained. In order to create a figure from the intermediate data, this must be processed to obtain intermediate data exclusively for figure creation, and this must be plotted using software for that purpose to produce a drawing. Alternatively, to check the rules, that is, to verify whether or not the interval is a predetermined distance, special intermediate data is obtained and checked using software for that purpose. That is, each task requires its own intermediate data (internal data format) for each software. Therefore, it cannot be used as general-purpose data for each software.

~- On the other hand, there are conventional systems that combine internal data formats into one, but in this case, there is a difficulty in processing figures that have internal blank spaces in particular. In other words, conventional methods for processing figures with blank areas are as shown in Figure 9: (1) Expressing one figure with two figures; (2) Providing a line segment connecting the outer and inner circumferences. Either one was taken. Method (1) is Snake.

It expresses a figure using two figure data of F, and since other line segments do not appear in the drawing output, it is suitable for figure output.
The presence of blank spaces is unrecognizable and cannot be used for verification. Method (2) is line segment G.

By providing H, a figure with a blank area is expressed, and this is a method that is commonly used. Although this allows recognition of blank areas, it is necessary to provide line segments (G, H) that do not originally exist in the figure, and when used for drawing, the drawing becomes difficult to read as shown in the figure. .

[Purpose of the invention]

The present invention solves the above-mentioned problems of the prior art, enables drawing creation and figure verification using a unique internal data format, is universally applicable to various software, outputs easy-to-read white figures, and is easy to work with. It is an object of the present invention to provide an advantageous graphic processing method that has a simple flow, fewer operational errors, and is time efficient.

[Means for Solving the Problems] The present invention provides a graphic data processing method for processing the positional coordinates of a plurality of points constituting a predetermined figure, in which each of the plurality of coordinates has a property of the coordinate. This configuration allows the attribute data to be added to data indicating coordinates for processing.

[For production]

As a result of the above configuration, the present invention adds attribute data to each vertex coordinate data in the internal data that has undergone graphical operation processing, and adds information as to whether it is located on the outer periphery or the inner periphery of the planar figure, for example, to this attribute data. Since this internal data can be used for drawing output, it is possible to obtain an easy-to-read drawing and recognize blank spaces.This internal data can also be used for figure verification, etc., making it a versatile figure description internal data. It can be a format. In other words, as shown in Figure 1, the data flow is
If you create basic data from a drawing, you can obtain an internal data format by simply performing a single data conversion for various tasks, and use this internal data format to verify each drawing output. V' can also be performed. As a result, there is less work, the flow is simple, there are fewer mistakes, and
The system can also be time-efficient.

[Embodiment] An embodiment of the present invention will be described below with reference to the drawings. This embodiment will be specifically described as being used for graphic data processing of a photomask pattern for producing a semiconductor device, for example, MO3.

However, it goes without saying that the present invention is not limited to the examples described below.

In this embodiment, an internal data format as shown in FIG. 2 is used. Word ttl 7-20 (JX,, JY,) in ARE A record in Figure 2
is the coordinate value of the first point of the figure, and attribute data IATI is added as the next data. Furthermore (JX2
, JY2) to (JX, 1.JY,), the attribute data of IATn to IAT is added to all the vertex coordinates. This attribute data in this example is used to indicate the properties of this vertex and the edge starting from this vertex. This attribute data uses only one word. In this case 1 wor
d is composed of 16 bits to 32 bits, and each bit has information. The embodiment uses 16 bits.

FIG. 3 shows the usage status of bits in this embodiment. b
it_O is 1 at the starting point of the figure drawn with one stroke, and 0 at other locations. Bit 1 is also 1 at the end point of the figure drawn with one stroke.
, otherwise 0. Further, bit 2 is set to 1 at each vertex on the inner periphery of the outline figure, and set to 0 at the other vertices. An example showing the state of each bit using an actual figure is shown in FIG.

That is, FIG. 4(a) shows the vertex numbers 1 to 13 of the figure shown here (the starting point 1 and the ending point 13 are the same point), but the bit
In O, the graphic information is as shown in Figure 4(b), and b
In it 1, it is also as shown in Fig. 4(c), and b
Similarly, in it 2, the result is as shown in FIG. 4(d). In this way, 1 of the attribute data (for example rAT+) in FIG.
contains 16 (or less) pieces of information corresponding to the bits in FIG.

In the example of FIG. 3, bit 3. 7□ 10 to 15 are reserved. When information on other than MO3, such as bipolar type semiconductors, is required, this reserve can be used.

Among these bits, when outputting a drawing, if you do not draw a side whose starting point is the point where bit l is set to 1 (indicates the end point, see Figure 4 (c)), one piece of data consisting of a series of coordinates will be generated. It is possible to draw hollow shapes as . Furthermore, since all coordinates are described in one data, it is suitable for verification software such as dimensional inspection of figures.

For example, it can be used to verify the mutual relationship between patterns for forming a source, drain, and gate of a MOS, and to check the pattern.

In the case of this embodiment, as shown in FIG. 3, the other bits of the attribute data include information for extracting circuit information of the integrated circuit from the graphic information, and information on the sides parallel to the X and Y axes. Please enter the information. Therefore, it is possible to effectively utilize data having this internal data format in various software as input.

In the case of this embodiment, the software that can use the data in this internal data format as input include: ■Drawing output program ■Design rule check program ■Electrical connection check program ■Circuit information extraction program be. ■ can be used to draw the figure as it is, ■ can be used to verify whether the rules are appropriate, and ■ can be used to check whether there is a connection violation. It can also be implemented as a program to deal with the problem, and ■ can be used as if drawing a circuit diagram as it is, and by using this, it can be compared with the design of the company.
It can be used for verification.

In this embodiment, attribute data is added to each coordinate point in the graphic description data, and the bits in this attribute data are used to represent the attributes of each point and each side. Moreover, by writing information about whether the planar shape is on the outer or inner circumference in this attribute data, it is possible to express a hollow shape with a single stroke and use this data as input for a verification program. Therefore, it can be used extremely effectively.

That is, by using attribute data and each bit within this data, it has become possible to support various software.

By adding this attribute data to each vertex coordinate and also indicating the attributes of the side starting from this coordinate, it is now possible to support both drawing output and figure verification. Furthermore, since one type of internal data can be used with all software, it has the effect of improving work efficiency and reducing work errors.

It should be noted that the original data may become intermediate data as it is, and it goes without saying that such cases are also included in the present invention.

〔Effect of the invention〕

As mentioned above, the graphic data processing method of the present invention enables drawing creation and graphic verification using a single internal data format, is universally applicable to various software, outputs easy-to-see white shapes, and is easy to work with. It has the effect of having a simple flow, fewer work errors, and good time efficiency.

[Brief explanation of drawings]

FIG. 1 is a flow diagram showing an example of the data flow of the present invention. FIG. 2 is a diagram showing the internal data format of an embodiment of the present invention, FIG. 3 is a diagram showing the usage status of bits on the same side, and FIG.
The figure is a diagram showing an example of the state of bits regarding an actual figure. FIG. 5 to FIG. 9 are drawings for explaining each conventional example. I---1 drawing, n---1 basic data creation, ■-
---Data conversion, IV--Internal data format, V
----1. Figure output, v' ----1. Figure verification.

Claims (1)

[Claims] A graphic data processing method for processing positional coordinates of a plurality of points constituting a predetermined figure, wherein each of the plurality of coordinates has attribute data indicating properties of the coordinates. .