JPS6270170U - - Google Patents
Info
- Publication number
- JPS6270170U JPS6270170U JP15930985U JP15930985U JPS6270170U JP S6270170 U JPS6270170 U JP S6270170U JP 15930985 U JP15930985 U JP 15930985U JP 15930985 U JP15930985 U JP 15930985U JP S6270170 U JPS6270170 U JP S6270170U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- sensor
- sensor cover
- evaporation sources
- sensors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008020 evaporation Effects 0.000 claims description 4
- 238000001704 evaporation Methods 0.000 claims description 4
- 239000010409 thin film Substances 0.000 claims 2
- 239000010408 film Substances 0.000 claims 1
- 238000007733 ion plating Methods 0.000 claims 1
- 238000007796 conventional method Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15930985U JPS6270170U (fr) | 1985-10-18 | 1985-10-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15930985U JPS6270170U (fr) | 1985-10-18 | 1985-10-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6270170U true JPS6270170U (fr) | 1987-05-02 |
Family
ID=31083616
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15930985U Pending JPS6270170U (fr) | 1985-10-18 | 1985-10-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6270170U (fr) |
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1985
- 1985-10-18 JP JP15930985U patent/JPS6270170U/ja active Pending