JPS6270168U - - Google Patents
Info
- Publication number
- JPS6270168U JPS6270168U JP16068285U JP16068285U JPS6270168U JP S6270168 U JPS6270168 U JP S6270168U JP 16068285 U JP16068285 U JP 16068285U JP 16068285 U JP16068285 U JP 16068285U JP S6270168 U JPS6270168 U JP S6270168U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- vapor deposition
- sectional area
- heat generation
- taken
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008020 evaporation Effects 0.000 claims description 2
- 238000001704 evaporation Methods 0.000 claims description 2
- 230000020169 heat generation Effects 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16068285U JPS6270168U (en:Method) | 1985-10-22 | 1985-10-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16068285U JPS6270168U (en:Method) | 1985-10-22 | 1985-10-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6270168U true JPS6270168U (en:Method) | 1987-05-02 |
Family
ID=31086287
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16068285U Pending JPS6270168U (en:Method) | 1985-10-22 | 1985-10-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6270168U (en:Method) |
-
1985
- 1985-10-22 JP JP16068285U patent/JPS6270168U/ja active Pending