JPS6270168U - - Google Patents

Info

Publication number
JPS6270168U
JPS6270168U JP16068285U JP16068285U JPS6270168U JP S6270168 U JPS6270168 U JP S6270168U JP 16068285 U JP16068285 U JP 16068285U JP 16068285 U JP16068285 U JP 16068285U JP S6270168 U JPS6270168 U JP S6270168U
Authority
JP
Japan
Prior art keywords
boat
vapor deposition
sectional area
heat generation
taken
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16068285U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16068285U priority Critical patent/JPS6270168U/ja
Publication of JPS6270168U publication Critical patent/JPS6270168U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP16068285U 1985-10-22 1985-10-22 Pending JPS6270168U (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16068285U JPS6270168U (enrdf_load_html_response) 1985-10-22 1985-10-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16068285U JPS6270168U (enrdf_load_html_response) 1985-10-22 1985-10-22

Publications (1)

Publication Number Publication Date
JPS6270168U true JPS6270168U (enrdf_load_html_response) 1987-05-02

Family

ID=31086287

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16068285U Pending JPS6270168U (enrdf_load_html_response) 1985-10-22 1985-10-22

Country Status (1)

Country Link
JP (1) JPS6270168U (enrdf_load_html_response)

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