JPS6269394U - - Google Patents

Info

Publication number

JPS6269394U

JPS6269394U JP16067485U JP16067485U JPS6269394U JP S6269394 U JPS6269394 U JP S6269394U JP 16067485 U JP16067485 U JP 16067485U JP 16067485 U JP16067485 U JP 16067485U JP S6269394 U JPS6269394 U JP S6269394U

Authority

JP

Japan

Prior art keywords

film

transparent

predetermined shape

dielectric film

transparent dielectric

Prior art date

1985-10-22

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000010408 film Substances 0.000 claims description 16
• 239000000758 substrate Substances 0.000 claims description 3
• 239000010409 thin film Substances 0.000 claims description 3
• 239000006096 absorbing agent Substances 0.000 claims description 2
• 239000002184 metal Substances 0.000 claims description 2
• 239000002253 acid Substances 0.000 claims 1
• 239000000470 constituent Substances 0.000 claims 1
• 238000005530 etching Methods 0.000 claims 1
• 239000000463 material Substances 0.000 claims 1
• 239000011521 glass Substances 0.000 description 1
• 238000000206 photolithography Methods 0.000 description 1