JPS6269065A - Hot air-flow generator - Google Patents

Hot air-flow generator

Info

Publication number
JPS6269065A
JPS6269065A JP60206413A JP20641385A JPS6269065A JP S6269065 A JPS6269065 A JP S6269065A JP 60206413 A JP60206413 A JP 60206413A JP 20641385 A JP20641385 A JP 20641385A JP S6269065 A JPS6269065 A JP S6269065A
Authority
JP
Japan
Prior art keywords
heater
hot air
ceramics
cover
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP60206413A
Other languages
Japanese (ja)
Inventor
Masayoshi Misono
御園 正義
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP60206413A priority Critical patent/JPS6269065A/en
Priority to KR1019860007392A priority patent/KR870003358A/en
Publication of JPS6269065A publication Critical patent/JPS6269065A/en
Pending legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24HFLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H3/00Air heaters
    • F24H3/02Air heaters with forced circulation
    • F24H3/04Air heaters with forced circulation the air being in direct contact with the heating medium, e.g. electric heating element
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26DRYING
    • F26BDRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B21/00Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
    • F26B21/001Drying-air generating units, e.g. movable, independent of drying enclosure

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Direct Air Heating By Heater Or Combustion Gas (AREA)
  • Drying Of Solid Materials (AREA)
  • Resistance Heating (AREA)

Abstract

PURPOSE:To prolong the service life of the generator and improve the high reliability thereof by using a conductive ceramics for heater materials. CONSTITUTION:A heater 10 made of conductive ceramics is disposed within a cover 3. Ceramics are exceedingly stable from a thermal point view, it is usable even at a temperature of approximately 1,000 deg.C. Ceramics are also usable in a bulky state, and have a small thermal expansion coefficient, and further a high mechanical strength, while a touch, breaking of wire or the like hardly occur.

Description

【発明の詳細な説明】 〔発明の利用分野〕 本発明は、電子部品、極端に汚れ金嫌う製品。[Detailed description of the invention] [Field of application of the invention] This invention applies to electronic parts, products that are extremely sensitive to dirt and gold.

材料等の加熱や乾燥全りIノーンに行なう電気式の熱風
発生器に関する。
This invention relates to an electric hot air generator that heats and dries materials without any hassle.

〔発明の背景〕[Background of the invention]

例えば、電子管、半導体等の電子部品は、高純度材料の
使用、プロセス条件の厳密さから、加熱や乾燥の方法に
制約が多い。また設備の設置環境のコントロール上、コ
ンノぐクトで、かつ熱交換効率の旨い熱源が必要である
For example, electronic components such as electron tubes and semiconductors have many restrictions on heating and drying methods due to the use of high-purity materials and strict process conditions. In addition, in order to control the installation environment of the equipment, a heat source that is continuous and has good heat exchange efficiency is required.

このような要望’ki7を丁ものとして、従来1例えば
第1図に示すような熱風発生器が知らnている。外側カ
バー1と内側カバー2とからなる筒状のカバー3内には
、絶縁物よりなるヒータ保持部4に巻回さ九π金属線の
ヒータ5が配設さnている。
In response to these demands, a hot air generator, for example, as shown in FIG. 1, has been known in the past. Inside a cylindrical cover 3 made up of an outer cover 1 and an inner cover 2, a heater 5 made of a 9π metal wire is arranged and wound around a heater holding part 4 made of an insulating material.

そこで、気体導入口6から内部に被加熱気体。Therefore, the heated gas is introduced into the interior from the gas inlet 6.

例えば高圧のエアを導入すると、エアはヒータ5で加熱
されて熱風吐出ロアから熱風として吐出する。この場@
−6熱風の温fは温度センサ8で検出さ1.ヒータ5の
コントロール回路へフィードバックされ、コントロール
さnる。
For example, when high-pressure air is introduced, the air is heated by the heater 5 and is discharged as hot air from the hot-air discharge lower. This place @
-6 The temperature f of the hot air is detected by the temperature sensor 8.1. It is fed back to the control circuit of the heater 5 and controlled.

このような熱風発生器は次のような特徴全有する。(1
)燃焼ガスを発生しないのでクリーンである。
Such a hot air generator has all the following features: (1
) It is clean as it does not generate combustion gas.

(2)熱風の温度′5!:直接測定してコントロールで
きるので温度制御が容易である。(3)ヒータが直接熱
風に接するので熱効率が良い。(4)多量の熱エネルギ
をコン/ぞクトな装置で発生できる。(5)風速が速い
ので多量な熱供給が可能である。
(2) Hot air temperature '5! : Temperature control is easy because it can be directly measured and controlled. (3) Thermal efficiency is good because the heater is in direct contact with hot air. (4) A large amount of thermal energy can be generated with a compact device. (5) Since the wind speed is high, a large amount of heat can be supplied.

前記ヒータ5の材料は、通常、ニクロム、カンタル等の
ように比較的耐熱性が良く、かつ酸化しにくい材料が用
いらnている。しかし、この種のヒータ5は、熱風が直
接的に触れ、ヒータ5表面が常に新鮮な空気にさらされ
るので、ヒータ5の酸化は単純に大気中にヒータ全放置
した場合に比して進行が速い。特に高温の熱風金得たい
場合は一層醗化が進み、ヒータがやせ細ってくる。この
ため、熱風温度の実用限度は700℃程度である。
The material of the heater 5 is usually a material that has relatively good heat resistance and is resistant to oxidation, such as nichrome or kanthal. However, in this type of heater 5, hot air comes into direct contact with it, and the surface of the heater 5 is constantly exposed to fresh air, so oxidation of the heater 5 progresses more quickly than if the heater 5 were simply left in the atmosphere. fast. Especially when you want to obtain high-temperature hot air, the temperature will increase further and the heater will become thinner. Therefore, the practical limit of the hot air temperature is about 700°C.

またヒータ5の材料は細い金属線であるので、高温に保
持するとヒータ5が延びて隣接する部分のタッチが生ず
る。
Further, since the material of the heater 5 is a thin metal wire, when the heater 5 is held at a high temperature, the heater 5 extends and touches adjacent parts.

〔発明の目的〕[Purpose of the invention]

本発明の目的は、長寿命及び高信頼性の熱風発生器を提
供することにある。
An object of the present invention is to provide a hot air generator with long life and high reliability.

〔発明の概要〕 本発明は、筒状のカバー内にヒータ全配設し。[Summary of the invention] In the present invention, the heater is entirely disposed within a cylindrical cover.

カバーの気体導入口より内部に気体全速ってヒータに直
接接触させ熱交換させ、カバーの熱風吐出口より熱風を
吐出させる熱風発生器全対象としている。そして、#記
ヒータ材料として、導電性セラミックスを用いてなる。
This applies to all hot-air generators in which gas flows inside through the gas inlet of the cover and directly contacts the heater for heat exchange, and hot air is discharged from the hot-air outlet of the cover. Conductive ceramics are used as the # heater material.

〔発明の実施例〕[Embodiments of the invention]

以下5本発明の一実施例全第2図により説明する。なお
、第1図と同じ部材には目Iじ符号を付し。
Hereinafter, five embodiments of the present invention will be explained with reference to FIG. Note that the same members as in FIG. 1 are designated by the same reference numerals.

その説明を省略する。カバー3の内部には、導電性セラ
ミックスよりなるヒータ10が配設さnている。
The explanation will be omitted. A heater 10 made of conductive ceramics is disposed inside the cover 3.

このように、ヒータlOの材料は導電性セラミックスよ
りなるので1次のような特徴を有する。
As described above, since the material of the heater IO is made of conductive ceramics, it has first-order characteristics.

(1)セラミックス自体は1500〜2000℃で焼結
するため、熱的に非常に安定しており、1000℃程度
でも使用可能である。(2)セラミックスは添加物のj
lヲ変えることにより抵抗率全仏い範囲で可変できるの
で、金属ヒータのように長い線材ではなく、バルクの状
態で使用可能であり、熱膨張係数も小さく、かつ高温で
の機械的強度が高く。
(1) Ceramics themselves are sintered at 1500 to 2000°C, so they are very thermally stable and can be used even at temperatures of about 1000°C. (2) Ceramics are additives
By changing the resistivity, the resistivity can be varied over a wide range, so it can be used in bulk rather than in long wires like metal heaters, has a small coefficient of thermal expansion, and has high mechanical strength at high temperatures. .

タッチ、断線等が生じにくい。Touches, disconnections, etc. are less likely to occur.

なお、導電性セラミック材はその種類は限定されないが
、実験の結果、 StC!−ZrR2系及びAt20 
s −Z r B 2系が最も好ましい結果が得らnた
。またカバー3の形状は特に図示の形状に限定されるも
のでなく、使用目的に応じて種々の形状に変更してもよ
い。
The type of conductive ceramic material is not limited, but as a result of experiments, StC! -ZrR2 system and At20
The most favorable results were obtained with the s-ZrB2 system. Further, the shape of the cover 3 is not particularly limited to the illustrated shape, and may be changed to various shapes depending on the purpose of use.

〔発明の効果〕〔Effect of the invention〕

以上の説明751ら明らかなように、本発明によnば、
ヒータの寿命が延びると共に、高温の熱風が得られる。
As is clear from the above explanation 751, according to the present invention,
The lifespan of the heater is extended and hot air at a high temperature can be obtained.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来例の断面図、第2図は本発明の一実施例を
示す断面図である。 3・・・カバー、   6・・・気体導入口、   7
・・・熱風吐出口、    10・・・ヒータ。 第1図 第2図
FIG. 1 is a sectional view of a conventional example, and FIG. 2 is a sectional view showing an embodiment of the present invention. 3... Cover, 6... Gas inlet, 7
...Hot air outlet, 10...Heater. Figure 1 Figure 2

Claims (1)

【特許請求の範囲】[Claims] 筒状のカバー内にヒータを配設し、前記カバーの気体導
入口より内部に気体を送つて前記ヒータに直接接触させ
て熱交換させ、前記カバーの熱風吐出口より熱風を吐出
させる熱風発生器において、前記ヒータ材料に導電性セ
ラミックスを用いたことを特徴とする熱風発生器。
A hot air generator in which a heater is disposed within a cylindrical cover, gas is sent inside through a gas inlet of the cover to directly contact the heater for heat exchange, and hot air is discharged from a hot air outlet of the cover. A hot air generator characterized in that conductive ceramics are used as the heater material.
JP60206413A 1985-09-20 1985-09-20 Hot air-flow generator Pending JPS6269065A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP60206413A JPS6269065A (en) 1985-09-20 1985-09-20 Hot air-flow generator
KR1019860007392A KR870003358A (en) 1985-09-20 1986-09-04 Hot air generator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60206413A JPS6269065A (en) 1985-09-20 1985-09-20 Hot air-flow generator

Publications (1)

Publication Number Publication Date
JPS6269065A true JPS6269065A (en) 1987-03-30

Family

ID=16522953

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60206413A Pending JPS6269065A (en) 1985-09-20 1985-09-20 Hot air-flow generator

Country Status (2)

Country Link
JP (1) JPS6269065A (en)
KR (1) KR870003358A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0450392U (en) * 1990-09-01 1992-04-28

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0450392U (en) * 1990-09-01 1992-04-28
JPH0720550Y2 (en) * 1990-09-01 1995-05-15 株式会社キクチ Air nozzle

Also Published As

Publication number Publication date
KR870003358A (en) 1987-04-16

Similar Documents

Publication Publication Date Title
US3912905A (en) Electric resistance heating device
JP2007298508A (en) Sensor
US4241292A (en) Resistive heater
CN105972570B (en) Steam generator and steaming plant
US20210251045A1 (en) Modular ceramic heater
JPH07282961A (en) Heater
JPS6269065A (en) Hot air-flow generator
WO2023184886A1 (en) All-ceramic heating element
EP0933085A3 (en) Autoclave device and PTC heating arrangement for use therewith
US5868497A (en) Thermocouple for use in an apparatus for manufacturing a semiconductor device
GB2202418A (en) Porous ceramic support for electric heating element
CN208735902U (en) A kind of high power PTC air heater
US3569602A (en) Temperature programming apparatus with a heating sensing arrangement
JP2534157B2 (en) Hot air electric heater
JPH01121628A (en) Ignition heater
EP1988747A2 (en) Method of manufacturing film heater using heat-resistant crystallized glass
CA1243351A (en) Oxygen sensor with concentric ceramic heater
JPH0533524U (en) Heater for single-wafer CVD equipment
WO2018000497A1 (en) Vapour generator and vapour device
JPS6217976A (en) Far infrared radiating body
JPH03294779A (en) Hot blast generating device
JPH01117287A (en) Far infrared radiation heating body and manufacture thereof
JPH086235Y2 (en) Heat treatment equipment for electronic parts
JPS59188549A (en) Two-terminal type semiconductor gas detecting element
JP2000306917A (en) Substrate heater