JPS6268234U - - Google Patents

Info

Publication number
JPS6268234U
JPS6268234U JP15937485U JP15937485U JPS6268234U JP S6268234 U JPS6268234 U JP S6268234U JP 15937485 U JP15937485 U JP 15937485U JP 15937485 U JP15937485 U JP 15937485U JP S6268234 U JPS6268234 U JP S6268234U
Authority
JP
Japan
Prior art keywords
wafer
displaying
groove
stored
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15937485U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15937485U priority Critical patent/JPS6268234U/ja
Publication of JPS6268234U publication Critical patent/JPS6268234U/ja
Pending legal-status Critical Current

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Landscapes

  • Packaging Frangible Articles (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例の斜視図である。 １ａ，１ｂ……鏡面仕上げステンレス板、２…
…ツヤ消し黒色塗装面。

Claims (1)

    【実用新案登録請求の範囲】
  1. ウエハーを収納する溝の位置の表示機構を有す
    ることを特徴とするウエハーキヤリア。
JP15937485U 1985-10-17 1985-10-17 Pending JPS6268234U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15937485U JPS6268234U (ja) 1985-10-17 1985-10-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15937485U JPS6268234U (ja) 1985-10-17 1985-10-17

Publications (1)

Publication Number Publication Date
JPS6268234U true JPS6268234U (ja) 1987-04-28

Family

ID=31083744

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15937485U Pending JPS6268234U (ja) 1985-10-17 1985-10-17

Country Status (1)

Country Link
JP (1) JPS6268234U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006123157A (ja) * 2004-09-28 2006-05-18 Nidec Sankyo Corp ロボットを教示するロボット教示用プログラム、及びこれに使用するカセット、位置測定器具並びにこれらを利用したロボット作動方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006123157A (ja) * 2004-09-28 2006-05-18 Nidec Sankyo Corp ロボットを教示するロボット教示用プログラム、及びこれに使用するカセット、位置測定器具並びにこれらを利用したロボット作動方法

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