JPS6268232U - - Google Patents

Info

Publication number
JPS6268232U
JPS6268232U JP15855185U JP15855185U JPS6268232U JP S6268232 U JPS6268232 U JP S6268232U JP 15855185 U JP15855185 U JP 15855185U JP 15855185 U JP15855185 U JP 15855185U JP S6268232 U JPS6268232 U JP S6268232U
Authority
JP
Japan
Prior art keywords
basket body
basket
wafer
wafer processing
wafer holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15855185U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15855185U priority Critical patent/JPS6268232U/ja
Publication of JPS6268232U publication Critical patent/JPS6268232U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP15855185U 1985-10-18 1985-10-18 Pending JPS6268232U (US06277897-20010821-C00009.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15855185U JPS6268232U (US06277897-20010821-C00009.png) 1985-10-18 1985-10-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15855185U JPS6268232U (US06277897-20010821-C00009.png) 1985-10-18 1985-10-18

Publications (1)

Publication Number Publication Date
JPS6268232U true JPS6268232U (US06277897-20010821-C00009.png) 1987-04-28

Family

ID=31082146

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15855185U Pending JPS6268232U (US06277897-20010821-C00009.png) 1985-10-18 1985-10-18

Country Status (1)

Country Link
JP (1) JPS6268232U (US06277897-20010821-C00009.png)

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