JPS6268227U - - Google Patents

Info

Publication number
JPS6268227U
JPS6268227U JP15922985U JP15922985U JPS6268227U JP S6268227 U JPS6268227 U JP S6268227U JP 15922985 U JP15922985 U JP 15922985U JP 15922985 U JP15922985 U JP 15922985U JP S6268227 U JPS6268227 U JP S6268227U
Authority
JP
Japan
Prior art keywords
gas
susceptor
substrate
vapor deposition
chemical vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15922985U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15922985U priority Critical patent/JPS6268227U/ja
Publication of JPS6268227U publication Critical patent/JPS6268227U/ja
Pending legal-status Critical Current

Links

JP15922985U 1985-10-17 1985-10-17 Pending JPS6268227U (US20020051482A1-20020502-M00012.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15922985U JPS6268227U (US20020051482A1-20020502-M00012.png) 1985-10-17 1985-10-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15922985U JPS6268227U (US20020051482A1-20020502-M00012.png) 1985-10-17 1985-10-17

Publications (1)

Publication Number Publication Date
JPS6268227U true JPS6268227U (US20020051482A1-20020502-M00012.png) 1987-04-28

Family

ID=31083464

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15922985U Pending JPS6268227U (US20020051482A1-20020502-M00012.png) 1985-10-17 1985-10-17

Country Status (1)

Country Link
JP (1) JPS6268227U (US20020051482A1-20020502-M00012.png)

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