JPS6267458U - - Google Patents
Info
- Publication number
- JPS6267458U JPS6267458U JP15779385U JP15779385U JPS6267458U JP S6267458 U JPS6267458 U JP S6267458U JP 15779385 U JP15779385 U JP 15779385U JP 15779385 U JP15779385 U JP 15779385U JP S6267458 U JPS6267458 U JP S6267458U
- Authority
- JP
- Japan
- Prior art keywords
- rotating disk
- mounting portion
- wafer mounting
- disk
- diameter periphery
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005468 ion implantation Methods 0.000 claims 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15779385U JPS6267458U (fi) | 1985-10-17 | 1985-10-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15779385U JPS6267458U (fi) | 1985-10-17 | 1985-10-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6267458U true JPS6267458U (fi) | 1987-04-27 |
Family
ID=31080675
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15779385U Pending JPS6267458U (fi) | 1985-10-17 | 1985-10-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6267458U (fi) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5796452A (en) * | 1980-12-08 | 1982-06-15 | Nisshin Haiboruteeji Kk | Wafer mounting device for ion implanting device |
| JPS57101327A (en) * | 1980-12-16 | 1982-06-23 | Nisshin Haiboruteeji Kk | Wafer carrier in ion implanting device |
| JPS57151263A (en) * | 1981-03-13 | 1982-09-18 | Mitsubishi Electric Corp | Eddy current generating rotary disc |
-
1985
- 1985-10-17 JP JP15779385U patent/JPS6267458U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5796452A (en) * | 1980-12-08 | 1982-06-15 | Nisshin Haiboruteeji Kk | Wafer mounting device for ion implanting device |
| JPS57101327A (en) * | 1980-12-16 | 1982-06-23 | Nisshin Haiboruteeji Kk | Wafer carrier in ion implanting device |
| JPS57151263A (en) * | 1981-03-13 | 1982-09-18 | Mitsubishi Electric Corp | Eddy current generating rotary disc |