JPS6265830U - - Google Patents
Info
- Publication number
- JPS6265830U JPS6265830U JP15689885U JP15689885U JPS6265830U JP S6265830 U JPS6265830 U JP S6265830U JP 15689885 U JP15689885 U JP 15689885U JP 15689885 U JP15689885 U JP 15689885U JP S6265830 U JPS6265830 U JP S6265830U
- Authority
- JP
- Japan
- Prior art keywords
- hanger
- susceptor
- connection pin
- vapor phase
- barrel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001947 vapour-phase growth Methods 0.000 claims description 4
- 239000010453 quartz Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15689885U JPH0719141Y2 (ja) | 1985-10-14 | 1985-10-14 | バレル型気相成長装置のサセプタ連結装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15689885U JPH0719141Y2 (ja) | 1985-10-14 | 1985-10-14 | バレル型気相成長装置のサセプタ連結装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6265830U true JPS6265830U (enExample) | 1987-04-23 |
| JPH0719141Y2 JPH0719141Y2 (ja) | 1995-05-01 |
Family
ID=31078945
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15689885U Expired - Lifetime JPH0719141Y2 (ja) | 1985-10-14 | 1985-10-14 | バレル型気相成長装置のサセプタ連結装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0719141Y2 (enExample) |
-
1985
- 1985-10-14 JP JP15689885U patent/JPH0719141Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0719141Y2 (ja) | 1995-05-01 |