JPS6265830U - - Google Patents

Info

Publication number
JPS6265830U
JPS6265830U JP15689885U JP15689885U JPS6265830U JP S6265830 U JPS6265830 U JP S6265830U JP 15689885 U JP15689885 U JP 15689885U JP 15689885 U JP15689885 U JP 15689885U JP S6265830 U JPS6265830 U JP S6265830U
Authority
JP
Japan
Prior art keywords
hanger
susceptor
connection pin
vapor phase
barrel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15689885U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0719141Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15689885U priority Critical patent/JPH0719141Y2/ja
Publication of JPS6265830U publication Critical patent/JPS6265830U/ja
Application granted granted Critical
Publication of JPH0719141Y2 publication Critical patent/JPH0719141Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP15689885U 1985-10-14 1985-10-14 バレル型気相成長装置のサセプタ連結装置 Expired - Lifetime JPH0719141Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15689885U JPH0719141Y2 (ja) 1985-10-14 1985-10-14 バレル型気相成長装置のサセプタ連結装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15689885U JPH0719141Y2 (ja) 1985-10-14 1985-10-14 バレル型気相成長装置のサセプタ連結装置

Publications (2)

Publication Number Publication Date
JPS6265830U true JPS6265830U (enrdf_load_html_response) 1987-04-23
JPH0719141Y2 JPH0719141Y2 (ja) 1995-05-01

Family

ID=31078945

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15689885U Expired - Lifetime JPH0719141Y2 (ja) 1985-10-14 1985-10-14 バレル型気相成長装置のサセプタ連結装置

Country Status (1)

Country Link
JP (1) JPH0719141Y2 (enrdf_load_html_response)

Also Published As

Publication number Publication date
JPH0719141Y2 (ja) 1995-05-01

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