JPS6265829U - - Google Patents
Info
- Publication number
- JPS6265829U JPS6265829U JP15839185U JP15839185U JPS6265829U JP S6265829 U JPS6265829 U JP S6265829U JP 15839185 U JP15839185 U JP 15839185U JP 15839185 U JP15839185 U JP 15839185U JP S6265829 U JPS6265829 U JP S6265829U
- Authority
- JP
- Japan
- Prior art keywords
- shroud
- semiconductor manufacturing
- manufacturing equipment
- steel plate
- stainless steel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- 239000012809 cooling fluid Substances 0.000 claims description 2
- 229910001220 stainless steel Inorganic materials 0.000 claims description 2
- 239000010935 stainless steel Substances 0.000 claims description 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15839185U JPH021860Y2 (ja�@�@) | 1985-10-15 | 1985-10-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15839185U JPH021860Y2 (ja�@�@) | 1985-10-15 | 1985-10-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6265829U true JPS6265829U (ja�@�@) | 1987-04-23 |
| JPH021860Y2 JPH021860Y2 (ja�@�@) | 1990-01-17 |
Family
ID=31081834
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15839185U Expired JPH021860Y2 (ja�@�@) | 1985-10-15 | 1985-10-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH021860Y2 (ja�@�@) |
-
1985
- 1985-10-15 JP JP15839185U patent/JPH021860Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH021860Y2 (ja�@�@) | 1990-01-17 |