JPS6265829U - - Google Patents

Info

Publication number
JPS6265829U
JPS6265829U JP15839185U JP15839185U JPS6265829U JP S6265829 U JPS6265829 U JP S6265829U JP 15839185 U JP15839185 U JP 15839185U JP 15839185 U JP15839185 U JP 15839185U JP S6265829 U JPS6265829 U JP S6265829U
Authority
JP
Japan
Prior art keywords
shroud
semiconductor manufacturing
manufacturing equipment
steel plate
stainless steel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15839185U
Other languages
English (en)
Japanese (ja)
Other versions
JPH021860Y2 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15839185U priority Critical patent/JPH021860Y2/ja
Publication of JPS6265829U publication Critical patent/JPS6265829U/ja
Application granted granted Critical
Publication of JPH021860Y2 publication Critical patent/JPH021860Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP15839185U 1985-10-15 1985-10-15 Expired JPH021860Y2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15839185U JPH021860Y2 (cg-RX-API-DMAC7.html) 1985-10-15 1985-10-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15839185U JPH021860Y2 (cg-RX-API-DMAC7.html) 1985-10-15 1985-10-15

Publications (2)

Publication Number Publication Date
JPS6265829U true JPS6265829U (cg-RX-API-DMAC7.html) 1987-04-23
JPH021860Y2 JPH021860Y2 (cg-RX-API-DMAC7.html) 1990-01-17

Family

ID=31081834

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15839185U Expired JPH021860Y2 (cg-RX-API-DMAC7.html) 1985-10-15 1985-10-15

Country Status (1)

Country Link
JP (1) JPH021860Y2 (cg-RX-API-DMAC7.html)

Also Published As

Publication number Publication date
JPH021860Y2 (cg-RX-API-DMAC7.html) 1990-01-17

Similar Documents

Publication Publication Date Title
JPS6265829U (cg-RX-API-DMAC7.html)
JPS6265828U (cg-RX-API-DMAC7.html)
JPS6166217U (cg-RX-API-DMAC7.html)
JPS6176925U (cg-RX-API-DMAC7.html)
JPH0387075U (cg-RX-API-DMAC7.html)
JPS6323507U (cg-RX-API-DMAC7.html)
JPS61181976U (cg-RX-API-DMAC7.html)
JPS6270448U (cg-RX-API-DMAC7.html)
JPS621405U (cg-RX-API-DMAC7.html)
JPS61121393U (cg-RX-API-DMAC7.html)
JPS6256041U (cg-RX-API-DMAC7.html)
JPS62185370U (cg-RX-API-DMAC7.html)
JPS62111585U (cg-RX-API-DMAC7.html)
JPS62202585U (cg-RX-API-DMAC7.html)
JPS61161558U (cg-RX-API-DMAC7.html)
JPS61198891U (cg-RX-API-DMAC7.html)
JPS63101459U (cg-RX-API-DMAC7.html)
JPS61141568U (cg-RX-API-DMAC7.html)
JPS6229589U (cg-RX-API-DMAC7.html)
JPH0376665U (cg-RX-API-DMAC7.html)
JPS6247143U (cg-RX-API-DMAC7.html)
JPS6270416U (cg-RX-API-DMAC7.html)
JPS6191766U (cg-RX-API-DMAC7.html)
JPS6267940U (cg-RX-API-DMAC7.html)
JPH01115900U (cg-RX-API-DMAC7.html)