JPS6265797U - - Google Patents

Info

Publication number
JPS6265797U
JPS6265797U JP15610785U JP15610785U JPS6265797U JP S6265797 U JPS6265797 U JP S6265797U JP 15610785 U JP15610785 U JP 15610785U JP 15610785 U JP15610785 U JP 15610785U JP S6265797 U JPS6265797 U JP S6265797U
Authority
JP
Japan
Prior art keywords
panel
heat
deposition apparatus
film deposition
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15610785U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15610785U priority Critical patent/JPS6265797U/ja
Publication of JPS6265797U publication Critical patent/JPS6265797U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electroluminescent Light Sources (AREA)
JP15610785U 1985-10-11 1985-10-11 Pending JPS6265797U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15610785U JPS6265797U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-10-11 1985-10-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15610785U JPS6265797U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-10-11 1985-10-11

Publications (1)

Publication Number Publication Date
JPS6265797U true JPS6265797U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-04-23

Family

ID=31077416

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15610785U Pending JPS6265797U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-10-11 1985-10-11

Country Status (1)

Country Link
JP (1) JPS6265797U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

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