JPS6265527U - - Google Patents
Info
- Publication number
- JPS6265527U JPS6265527U JP15805285U JP15805285U JPS6265527U JP S6265527 U JPS6265527 U JP S6265527U JP 15805285 U JP15805285 U JP 15805285U JP 15805285 U JP15805285 U JP 15805285U JP S6265527 U JPS6265527 U JP S6265527U
- Authority
- JP
- Japan
- Prior art keywords
- hole
- pedestal
- spacer
- sensor element
- upper plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 6
- 125000006850 spacer group Chemical group 0.000 claims description 5
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 238000009792 diffusion process Methods 0.000 claims 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15805285U JPH0432586Y2 (https=) | 1985-10-15 | 1985-10-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15805285U JPH0432586Y2 (https=) | 1985-10-15 | 1985-10-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6265527U true JPS6265527U (https=) | 1987-04-23 |
| JPH0432586Y2 JPH0432586Y2 (https=) | 1992-08-05 |
Family
ID=31081175
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15805285U Expired JPH0432586Y2 (https=) | 1985-10-15 | 1985-10-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0432586Y2 (https=) |
-
1985
- 1985-10-15 JP JP15805285U patent/JPH0432586Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0432586Y2 (https=) | 1992-08-05 |