JPS6264769U - - Google Patents

Info

Publication number
JPS6264769U
JPS6264769U JP15422185U JP15422185U JPS6264769U JP S6264769 U JPS6264769 U JP S6264769U JP 15422185 U JP15422185 U JP 15422185U JP 15422185 U JP15422185 U JP 15422185U JP S6264769 U JPS6264769 U JP S6264769U
Authority
JP
Japan
Prior art keywords
strip
vacuum processing
sealing device
strips
processing chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15422185U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15422185U priority Critical patent/JPS6264769U/ja
Publication of JPS6264769U publication Critical patent/JPS6264769U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP15422185U 1985-10-08 1985-10-08 Pending JPS6264769U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15422185U JPS6264769U (enrdf_load_stackoverflow) 1985-10-08 1985-10-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15422185U JPS6264769U (enrdf_load_stackoverflow) 1985-10-08 1985-10-08

Publications (1)

Publication Number Publication Date
JPS6264769U true JPS6264769U (enrdf_load_stackoverflow) 1987-04-22

Family

ID=31073820

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15422185U Pending JPS6264769U (enrdf_load_stackoverflow) 1985-10-08 1985-10-08

Country Status (1)

Country Link
JP (1) JPS6264769U (enrdf_load_stackoverflow)

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