JPS6264767U - - Google Patents
Info
- Publication number
- JPS6264767U JPS6264767U JP15529985U JP15529985U JPS6264767U JP S6264767 U JPS6264767 U JP S6264767U JP 15529985 U JP15529985 U JP 15529985U JP 15529985 U JP15529985 U JP 15529985U JP S6264767 U JPS6264767 U JP S6264767U
- Authority
- JP
- Japan
- Prior art keywords
- vapor deposition
- deposition apparatus
- shielding plate
- metal electrode
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007740 vapor deposition Methods 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- HEPLMSKRHVKCAQ-UHFFFAOYSA-N lead nickel Chemical compound [Ni].[Pb] HEPLMSKRHVKCAQ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15529985U JPS6264767U (OSRAM) | 1985-10-11 | 1985-10-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15529985U JPS6264767U (OSRAM) | 1985-10-11 | 1985-10-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6264767U true JPS6264767U (OSRAM) | 1987-04-22 |
Family
ID=31075876
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15529985U Pending JPS6264767U (OSRAM) | 1985-10-11 | 1985-10-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6264767U (OSRAM) |
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1985
- 1985-10-11 JP JP15529985U patent/JPS6264767U/ja active Pending