JPS6263633U - - Google Patents

Info

Publication number
JPS6263633U
JPS6263633U JP15564485U JP15564485U JPS6263633U JP S6263633 U JPS6263633 U JP S6263633U JP 15564485 U JP15564485 U JP 15564485U JP 15564485 U JP15564485 U JP 15564485U JP S6263633 U JPS6263633 U JP S6263633U
Authority
JP
Japan
Prior art keywords
entrance
room
partition
clean room
outside
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15564485U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15564485U priority Critical patent/JPS6263633U/ja
Publication of JPS6263633U publication Critical patent/JPS6263633U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP15564485U 1985-10-14 1985-10-14 Pending JPS6263633U (US06818201-20041116-C00086.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15564485U JPS6263633U (US06818201-20041116-C00086.png) 1985-10-14 1985-10-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15564485U JPS6263633U (US06818201-20041116-C00086.png) 1985-10-14 1985-10-14

Publications (1)

Publication Number Publication Date
JPS6263633U true JPS6263633U (US06818201-20041116-C00086.png) 1987-04-20

Family

ID=31076525

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15564485U Pending JPS6263633U (US06818201-20041116-C00086.png) 1985-10-14 1985-10-14

Country Status (1)

Country Link
JP (1) JPS6263633U (US06818201-20041116-C00086.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58127035A (ja) * 1982-01-25 1983-07-28 Hitachi Ltd 清浄室装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58127035A (ja) * 1982-01-25 1983-07-28 Hitachi Ltd 清浄室装置

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