JPS626344B2 - - Google Patents
Info
- Publication number
- JPS626344B2 JPS626344B2 JP12609176A JP12609176A JPS626344B2 JP S626344 B2 JPS626344 B2 JP S626344B2 JP 12609176 A JP12609176 A JP 12609176A JP 12609176 A JP12609176 A JP 12609176A JP S626344 B2 JPS626344 B2 JP S626344B2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- dicing
- wafers
- cleaning
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 31
- 238000000034 method Methods 0.000 claims description 22
- 238000004140 cleaning Methods 0.000 claims description 20
- 238000001035 drying Methods 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 4
- 238000005507 spraying Methods 0.000 claims description 4
- 239000000110 cooling liquid Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 description 105
- 230000007246 mechanism Effects 0.000 description 13
- 238000005520 cutting process Methods 0.000 description 8
- 239000008188 pellet Substances 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 239000002699 waste material Substances 0.000 description 4
- 238000007664 blowing Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000007667 floating Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Dicing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12609176A JPS5351962A (en) | 1976-10-22 | 1976-10-22 | Dicing unit providing automatic handling mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12609176A JPS5351962A (en) | 1976-10-22 | 1976-10-22 | Dicing unit providing automatic handling mechanism |
Related Child Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60046594A Division JPS60216568A (ja) | 1985-03-11 | 1985-03-11 | ウエハの切削装置 |
| JP60046593A Division JPS60216567A (ja) | 1985-03-11 | 1985-03-11 | ウエハの切削装置 |
| JP60046592A Division JPS60216566A (ja) | 1985-03-11 | 1985-03-11 | ウエハの切削装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5351962A JPS5351962A (en) | 1978-05-11 |
| JPS626344B2 true JPS626344B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-02-10 |
Family
ID=14926370
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12609176A Granted JPS5351962A (en) | 1976-10-22 | 1976-10-22 | Dicing unit providing automatic handling mechanism |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5351962A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59133790U (ja) * | 1983-02-28 | 1984-09-07 | 株式会社東芝 | スクロ−ル圧縮機 |
-
1976
- 1976-10-22 JP JP12609176A patent/JPS5351962A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5351962A (en) | 1978-05-11 |
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