JPS6263230U - - Google Patents

Info

Publication number
JPS6263230U
JPS6263230U JP15374285U JP15374285U JPS6263230U JP S6263230 U JPS6263230 U JP S6263230U JP 15374285 U JP15374285 U JP 15374285U JP 15374285 U JP15374285 U JP 15374285U JP S6263230 U JPS6263230 U JP S6263230U
Authority
JP
Japan
Prior art keywords
arm
detection plate
utility
transfer device
model registration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15374285U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15374285U priority Critical patent/JPS6263230U/ja
Publication of JPS6263230U publication Critical patent/JPS6263230U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Sheets, Magazines, And Separation Thereof (AREA)
JP15374285U 1985-10-09 1985-10-09 Pending JPS6263230U (US08063081-20111122-C00115.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15374285U JPS6263230U (US08063081-20111122-C00115.png) 1985-10-09 1985-10-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15374285U JPS6263230U (US08063081-20111122-C00115.png) 1985-10-09 1985-10-09

Publications (1)

Publication Number Publication Date
JPS6263230U true JPS6263230U (US08063081-20111122-C00115.png) 1987-04-20

Family

ID=31072895

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15374285U Pending JPS6263230U (US08063081-20111122-C00115.png) 1985-10-09 1985-10-09

Country Status (1)

Country Link
JP (1) JPS6263230U (US08063081-20111122-C00115.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02291144A (ja) * 1989-05-01 1990-11-30 Nidek Co Ltd ウェーハ搬送装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4877561A (US08063081-20111122-C00115.png) * 1972-01-21 1973-10-18

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4877561A (US08063081-20111122-C00115.png) * 1972-01-21 1973-10-18

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02291144A (ja) * 1989-05-01 1990-11-30 Nidek Co Ltd ウェーハ搬送装置

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