JPS6262947U - - Google Patents
Info
- Publication number
- JPS6262947U JPS6262947U JP15617485U JP15617485U JPS6262947U JP S6262947 U JPS6262947 U JP S6262947U JP 15617485 U JP15617485 U JP 15617485U JP 15617485 U JP15617485 U JP 15617485U JP S6262947 U JPS6262947 U JP S6262947U
- Authority
- JP
- Japan
- Prior art keywords
- pump
- vacuum
- test specimen
- vacuum container
- search
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Examining Or Testing Airtightness (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15617485U JPS6262947U (fr) | 1985-10-12 | 1985-10-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15617485U JPS6262947U (fr) | 1985-10-12 | 1985-10-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6262947U true JPS6262947U (fr) | 1987-04-18 |
Family
ID=31077547
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15617485U Pending JPS6262947U (fr) | 1985-10-12 | 1985-10-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6262947U (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01301137A (ja) * | 1988-05-30 | 1989-12-05 | Ulvac Corp | 急速真空漏れ探査装置 |
-
1985
- 1985-10-12 JP JP15617485U patent/JPS6262947U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01301137A (ja) * | 1988-05-30 | 1989-12-05 | Ulvac Corp | 急速真空漏れ探査装置 |