JPS6262945U - - Google Patents
Info
- Publication number
- JPS6262945U JPS6262945U JP15559585U JP15559585U JPS6262945U JP S6262945 U JPS6262945 U JP S6262945U JP 15559585 U JP15559585 U JP 15559585U JP 15559585 U JP15559585 U JP 15559585U JP S6262945 U JPS6262945 U JP S6262945U
- Authority
- JP
- Japan
- Prior art keywords
- unimorph type
- vacuum sensor
- unimorph
- introducing
- extracting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009795 derivation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15559585U JPS6262945U (OSRAM) | 1985-10-09 | 1985-10-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15559585U JPS6262945U (OSRAM) | 1985-10-09 | 1985-10-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6262945U true JPS6262945U (OSRAM) | 1987-04-18 |
Family
ID=31076435
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15559585U Pending JPS6262945U (OSRAM) | 1985-10-09 | 1985-10-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6262945U (OSRAM) |
-
1985
- 1985-10-09 JP JP15559585U patent/JPS6262945U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0223191U (OSRAM) | ||
| JPS6262945U (OSRAM) | ||
| WO2002016256A3 (en) | Method for making micromechanical structures having at least one lateral, small gap therebetween and micromechanical device produced thereby | |
| JPS6413119U (OSRAM) | ||
| JPH0257625U (OSRAM) | ||
| JPS6219819U (OSRAM) | ||
| JPS6368312U (OSRAM) | ||
| JPS6452313U (OSRAM) | ||
| JPS6392421U (OSRAM) | ||
| JPS63164219U (OSRAM) | ||
| JPH0259437U (OSRAM) | ||
| JPH01113496U (OSRAM) | ||
| JPS6236067U (OSRAM) | ||
| JPS6210090U (OSRAM) | ||
| JPS63200918U (OSRAM) | ||
| JPS62121895U (OSRAM) | ||
| JPS61143326U (OSRAM) | ||
| JPS61191624U (OSRAM) | ||
| JPS61158738U (OSRAM) | ||
| JPH0326993U (OSRAM) | ||
| JPS63165363U (OSRAM) | ||
| JPS6199374U (OSRAM) | ||
| JPS6383625U (OSRAM) | ||
| JPS62164981U (OSRAM) | ||
| JPS6360444U (OSRAM) |