JPS6262944U - - Google Patents

Info

Publication number
JPS6262944U
JPS6262944U JP15610485U JP15610485U JPS6262944U JP S6262944 U JPS6262944 U JP S6262944U JP 15610485 U JP15610485 U JP 15610485U JP 15610485 U JP15610485 U JP 15610485U JP S6262944 U JPS6262944 U JP S6262944U
Authority
JP
Japan
Prior art keywords
movable electrode
pressure sensor
diaphragm
fixing base
outer periphery
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15610485U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0435778Y2 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985156104U priority Critical patent/JPH0435778Y2/ja
Publication of JPS6262944U publication Critical patent/JPS6262944U/ja
Application granted granted Critical
Publication of JPH0435778Y2 publication Critical patent/JPH0435778Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP1985156104U 1985-10-11 1985-10-11 Expired JPH0435778Y2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985156104U JPH0435778Y2 (https=) 1985-10-11 1985-10-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985156104U JPH0435778Y2 (https=) 1985-10-11 1985-10-11

Publications (2)

Publication Number Publication Date
JPS6262944U true JPS6262944U (https=) 1987-04-18
JPH0435778Y2 JPH0435778Y2 (https=) 1992-08-25

Family

ID=31077410

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985156104U Expired JPH0435778Y2 (https=) 1985-10-11 1985-10-11

Country Status (1)

Country Link
JP (1) JPH0435778Y2 (https=)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58731A (ja) * 1981-06-25 1983-01-05 Matsushita Electric Ind Co Ltd 静電容量式圧力センサ
JPS5845534A (ja) * 1981-09-11 1983-03-16 Matsushita Electric Ind Co Ltd 静電容量型圧力センサ
JPS59171826A (ja) * 1983-03-22 1984-09-28 Copal Takeda Medical Kenkyusho:Kk 静電容量型圧力センサ−の温度補償装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58731A (ja) * 1981-06-25 1983-01-05 Matsushita Electric Ind Co Ltd 静電容量式圧力センサ
JPS5845534A (ja) * 1981-09-11 1983-03-16 Matsushita Electric Ind Co Ltd 静電容量型圧力センサ
JPS59171826A (ja) * 1983-03-22 1984-09-28 Copal Takeda Medical Kenkyusho:Kk 静電容量型圧力センサ−の温度補償装置

Also Published As

Publication number Publication date
JPH0435778Y2 (https=) 1992-08-25

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