JPS6259856B2 - - Google Patents
Info
- Publication number
- JPS6259856B2 JPS6259856B2 JP55188891A JP18889180A JPS6259856B2 JP S6259856 B2 JPS6259856 B2 JP S6259856B2 JP 55188891 A JP55188891 A JP 55188891A JP 18889180 A JP18889180 A JP 18889180A JP S6259856 B2 JPS6259856 B2 JP S6259856B2
- Authority
- JP
- Japan
- Prior art keywords
- particle
- magnetic field
- point
- charged particles
- slit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002245 particle Substances 0.000 claims description 116
- 238000001514 detection method Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 4
- 230000007935 neutral effect Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000003745 diagnosis Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 230000001131 transforming effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/28—Static spectrometers
- H01J49/30—Static spectrometers using magnetic analysers, e.g. Dempster spectrometer
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55188891A JPS57111939A (en) | 1980-12-26 | 1980-12-26 | Particle detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55188891A JPS57111939A (en) | 1980-12-26 | 1980-12-26 | Particle detector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57111939A JPS57111939A (en) | 1982-07-12 |
| JPS6259856B2 true JPS6259856B2 (enrdf_load_stackoverflow) | 1987-12-14 |
Family
ID=16231686
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP55188891A Granted JPS57111939A (en) | 1980-12-26 | 1980-12-26 | Particle detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57111939A (enrdf_load_stackoverflow) |
-
1980
- 1980-12-26 JP JP55188891A patent/JPS57111939A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57111939A (en) | 1982-07-12 |
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