JPS6258161U - - Google Patents
Info
- Publication number
- JPS6258161U JPS6258161U JP14920285U JP14920285U JPS6258161U JP S6258161 U JPS6258161 U JP S6258161U JP 14920285 U JP14920285 U JP 14920285U JP 14920285 U JP14920285 U JP 14920285U JP S6258161 U JPS6258161 U JP S6258161U
- Authority
- JP
- Japan
- Prior art keywords
- sleeve
- support disk
- mounting plate
- polishing head
- head body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 4
- 239000003082 abrasive agent Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Polishing Bodies And Polishing Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14920285U JPS6258161U (hr) | 1985-09-30 | 1985-09-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14920285U JPS6258161U (hr) | 1985-09-30 | 1985-09-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6258161U true JPS6258161U (hr) | 1987-04-10 |
Family
ID=31064187
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14920285U Pending JPS6258161U (hr) | 1985-09-30 | 1985-09-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6258161U (hr) |
-
1985
- 1985-09-30 JP JP14920285U patent/JPS6258161U/ja active Pending