JPS6258064U - - Google Patents
Info
- Publication number
- JPS6258064U JPS6258064U JP14928885U JP14928885U JPS6258064U JP S6258064 U JPS6258064 U JP S6258064U JP 14928885 U JP14928885 U JP 14928885U JP 14928885 U JP14928885 U JP 14928885U JP S6258064 U JPS6258064 U JP S6258064U
- Authority
- JP
- Japan
- Prior art keywords
- optical path
- laser
- vibration component
- motor
- detected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000000087 stabilizing effect Effects 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 3
- 230000010355 oscillation Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14928885U JPH0534125Y2 (el) | 1985-09-30 | 1985-09-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14928885U JPH0534125Y2 (el) | 1985-09-30 | 1985-09-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6258064U true JPS6258064U (el) | 1987-04-10 |
| JPH0534125Y2 JPH0534125Y2 (el) | 1993-08-30 |
Family
ID=31064353
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14928885U Expired - Lifetime JPH0534125Y2 (el) | 1985-09-30 | 1985-09-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0534125Y2 (el) |
-
1985
- 1985-09-30 JP JP14928885U patent/JPH0534125Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0534125Y2 (el) | 1993-08-30 |