JPS6258064U - - Google Patents

Info

Publication number
JPS6258064U
JPS6258064U JP14928885U JP14928885U JPS6258064U JP S6258064 U JPS6258064 U JP S6258064U JP 14928885 U JP14928885 U JP 14928885U JP 14928885 U JP14928885 U JP 14928885U JP S6258064 U JPS6258064 U JP S6258064U
Authority
JP
Japan
Prior art keywords
optical path
laser
vibration component
motor
detected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14928885U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0534125Y2 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14928885U priority Critical patent/JPH0534125Y2/ja
Publication of JPS6258064U publication Critical patent/JPS6258064U/ja
Application granted granted Critical
Publication of JPH0534125Y2 publication Critical patent/JPH0534125Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP14928885U 1985-09-30 1985-09-30 Expired - Lifetime JPH0534125Y2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14928885U JPH0534125Y2 (cg-RX-API-DMAC7.html) 1985-09-30 1985-09-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14928885U JPH0534125Y2 (cg-RX-API-DMAC7.html) 1985-09-30 1985-09-30

Publications (2)

Publication Number Publication Date
JPS6258064U true JPS6258064U (cg-RX-API-DMAC7.html) 1987-04-10
JPH0534125Y2 JPH0534125Y2 (cg-RX-API-DMAC7.html) 1993-08-30

Family

ID=31064353

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14928885U Expired - Lifetime JPH0534125Y2 (cg-RX-API-DMAC7.html) 1985-09-30 1985-09-30

Country Status (1)

Country Link
JP (1) JPH0534125Y2 (cg-RX-API-DMAC7.html)

Also Published As

Publication number Publication date
JPH0534125Y2 (cg-RX-API-DMAC7.html) 1993-08-30

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