JPS6258052U - - Google Patents

Info

Publication number

JPS6258052U

JPS6258052U JP14939285U JP14939285U JPS6258052U JP S6258052 U JPS6258052 U JP S6258052U JP 14939285 U JP14939285 U JP 14939285U JP 14939285 U JP14939285 U JP 14939285U JP S6258052 U JPS6258052 U JP S6258052U

Authority

JP

Japan

Prior art keywords

film

optical sensor

insulating layer

dimensionally

image information

Prior art date

1985-09-30

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

• Espacenet
• Global Dossier
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• 229910021417 amorphous silicon Inorganic materials 0.000 claims description 4
• 239000000758 substrate Substances 0.000 claims description 2
• 230000003287 optical effect Effects 0.000 claims 2
• ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims 1
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
• 229910052796 boron Inorganic materials 0.000 claims 1
• 229910052814 silicon oxide Inorganic materials 0.000 claims 1
• 239000010410 layer Substances 0.000 description 2
• 239000011241 protective layer Substances 0.000 description 1