JPS6258039U - - Google Patents

Info

Publication number
JPS6258039U
JPS6258039U JP14846185U JP14846185U JPS6258039U JP S6258039 U JPS6258039 U JP S6258039U JP 14846185 U JP14846185 U JP 14846185U JP 14846185 U JP14846185 U JP 14846185U JP S6258039 U JPS6258039 U JP S6258039U
Authority
JP
Japan
Prior art keywords
rotating drum
side wall
attached
semiconductor wafer
closable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14846185U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14846185U priority Critical patent/JPS6258039U/ja
Publication of JPS6258039U publication Critical patent/JPS6258039U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
JP14846185U 1985-09-28 1985-09-28 Pending JPS6258039U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14846185U JPS6258039U (enrdf_load_stackoverflow) 1985-09-28 1985-09-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14846185U JPS6258039U (enrdf_load_stackoverflow) 1985-09-28 1985-09-28

Publications (1)

Publication Number Publication Date
JPS6258039U true JPS6258039U (enrdf_load_stackoverflow) 1987-04-10

Family

ID=31062750

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14846185U Pending JPS6258039U (enrdf_load_stackoverflow) 1985-09-28 1985-09-28

Country Status (1)

Country Link
JP (1) JPS6258039U (enrdf_load_stackoverflow)

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