JPS6257784U - - Google Patents
Info
- Publication number
- JPS6257784U JPS6257784U JP14907185U JP14907185U JPS6257784U JP S6257784 U JPS6257784 U JP S6257784U JP 14907185 U JP14907185 U JP 14907185U JP 14907185 U JP14907185 U JP 14907185U JP S6257784 U JPS6257784 U JP S6257784U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- rotary pump
- oil rotary
- utility
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Description
図は本考案の実施例を示す要部説明図である。
１……真空装置、２……１と３を結ぶ配管、３
……吸着塔（充填塔）、４……３と５を結ぶ配管
、５……オリフイス（手動流調弁でも可）、６…
…５と８を結ぶ配管、７……電磁弁（ＦＯ弁）、
８……クライオポンプ、９……５と１１を結ぶ配
管、１０……電磁弁（ＦＣ弁）、１１……油回転
ポンプ、１２……発電機。
The figure is an explanatory diagram of main parts showing an embodiment of the present invention. 1... Vacuum device, 2... Piping connecting 1 and 3, 3
... Adsorption tower (packed tower), 4 ... Piping connecting 3 and 5, 5 ... Orifice (manual flow control valve is also acceptable), 6 ...
...Piping connecting 5 and 8, 7...Solenoid valve (FO valve),
8... Cryopump, 9... Piping connecting 5 and 11, 10... Solenoid valve (FC valve), 11... Oil rotary pump, 12... Generator.
Claims (1)
オポンプとを夫々接続してなることを特徴とする
真空保持装置。 A vacuum holding device comprising an oil rotary pump and a cryopump connected to an exhaust line of a vacuum device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14907185U JPS6257784U (en) | 1985-09-30 | 1985-09-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14907185U JPS6257784U (en) | 1985-09-30 | 1985-09-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6257784U true JPS6257784U (en) | 1987-04-10 |
Family
ID=31063932
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14907185U Pending JPS6257784U (en) | 1985-09-30 | 1985-09-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6257784U (en) |
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1985
- 1985-09-30 JP JP14907185U patent/JPS6257784U/ja active Pending