JPS6257035U - - Google Patents
Info
- Publication number
- JPS6257035U JPS6257035U JP14957185U JP14957185U JPS6257035U JP S6257035 U JPS6257035 U JP S6257035U JP 14957185 U JP14957185 U JP 14957185U JP 14957185 U JP14957185 U JP 14957185U JP S6257035 U JPS6257035 U JP S6257035U
- Authority
- JP
- Japan
- Prior art keywords
- ultra
- clean bench
- clean
- horizontal
- air flow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009423 ventilation Methods 0.000 claims 1
Landscapes
- Ventilation (AREA)
Description
第１図は本考案の水平層流型クリーンベンチの
縦断面図、第２図は従来の水平層流型クリーンベ
ンチの縦断面図である。
１１……フアン、１２……超清浄室床下、１３
……エアーチヤンバー、１４……フイルター、１
５……水平気流、１６……垂直気流、１７……ク
リーンベンチ下部、１８……風量調整機構付エア
ーリターン床、１９……クリーンベンチ上部の垂
直気流と水平気流が合流する部分、Ｈ……クリー
ンベンチ本体。
FIG. 1 is a vertical cross-sectional view of a horizontal laminar flow clean bench according to the present invention, and FIG. 2 is a vertical cross-sectional view of a conventional horizontal laminar flow clean bench. 11... Juan, 12... Ultra clean room under the floor, 13
...Air chamber, 14...Filter, 1
5... Horizontal airflow, 16... Vertical airflow, 17... Lower part of clean bench, 18... Air return floor with air volume adjustment mechanism, 19... Part where vertical airflow and horizontal airflow merge at the top of clean bench, H... Clean bench body.
Claims (1)
浄室内の垂直気流に合流させるクリーンベンチに
おいて、クリーンベンチ本体に内蔵したフアンの
エア吸込口を前記超清浄室の通気性床より下方位
置に設置し、かつクリーンベンチ本体上部の水平
気流と垂直気流との合流部分に２つの気流の流れ
を制御して合流させる方向制御部を設置したこと
を特徴とする水平層流型クリーンベンチ。 In a clean bench that generates horizontal airflow in an ultra-clean room and merges it with the vertical air flow inside the ultra-clean room, the air inlet of the fan built into the clean bench body is installed at a position below the ventilation floor of the ultra-clean room. A horizontal laminar flow type clean bench characterized in that a direction control unit is installed at the merging part of the horizontal air flow and the vertical air flow at the upper part of the clean bench main body to control the flow of the two air flows and make them merge.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14957185U JPS6257035U (en) | 1985-09-30 | 1985-09-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14957185U JPS6257035U (en) | 1985-09-30 | 1985-09-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6257035U true JPS6257035U (en) | 1987-04-09 |
Family
ID=31064906
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14957185U Pending JPS6257035U (en) | 1985-09-30 | 1985-09-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6257035U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017161103A (en) * | 2016-03-07 | 2017-09-14 | トヨタ自動車株式会社 | Air purification system |
-
1985
- 1985-09-30 JP JP14957185U patent/JPS6257035U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017161103A (en) * | 2016-03-07 | 2017-09-14 | トヨタ自動車株式会社 | Air purification system |