JPS6255779U - - Google Patents

Info

Publication number
JPS6255779U
JPS6255779U JP14746685U JP14746685U JPS6255779U JP S6255779 U JPS6255779 U JP S6255779U JP 14746685 U JP14746685 U JP 14746685U JP 14746685 U JP14746685 U JP 14746685U JP S6255779 U JPS6255779 U JP S6255779U
Authority
JP
Japan
Prior art keywords
rotor
flow path
path switching
stator
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14746685U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0351579Y2 (en, 2012
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985147466U priority Critical patent/JPH0351579Y2/ja
Publication of JPS6255779U publication Critical patent/JPS6255779U/ja
Application granted granted Critical
Publication of JPH0351579Y2 publication Critical patent/JPH0351579Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Indication Of The Valve Opening Or Closing Status (AREA)
  • Multiple-Way Valves (AREA)
  • Treatment Of Liquids With Adsorbents In General (AREA)
JP1985147466U 1985-09-27 1985-09-27 Expired JPH0351579Y2 (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985147466U JPH0351579Y2 (en, 2012) 1985-09-27 1985-09-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985147466U JPH0351579Y2 (en, 2012) 1985-09-27 1985-09-27

Publications (2)

Publication Number Publication Date
JPS6255779U true JPS6255779U (en, 2012) 1987-04-07
JPH0351579Y2 JPH0351579Y2 (en, 2012) 1991-11-06

Family

ID=31060852

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985147466U Expired JPH0351579Y2 (en, 2012) 1985-09-27 1985-09-27

Country Status (1)

Country Link
JP (1) JPH0351579Y2 (en, 2012)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018189231A (ja) * 2017-03-09 2018-11-29 バット ホールディング アーゲー 光センサを有する眞空バルブ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5221432U (en, 2012) * 1975-08-04 1977-02-15

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5221432U (en, 2012) * 1975-08-04 1977-02-15

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018189231A (ja) * 2017-03-09 2018-11-29 バット ホールディング アーゲー 光センサを有する眞空バルブ

Also Published As

Publication number Publication date
JPH0351579Y2 (en, 2012) 1991-11-06

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