JPS6255573U - - Google Patents

Info

Publication number

JPS6255573U

JPS6255573U JP14435985U JP14435985U JPS6255573U JP S6255573 U JPS6255573 U JP S6255573U JP 14435985 U JP14435985 U JP 14435985U JP 14435985 U JP14435985 U JP 14435985U JP S6255573 U JPS6255573 U JP S6255573U

Authority

JP

Japan

Prior art keywords

crucible

silicon carbide

raw material

single crystal

container

Prior art date

1985-09-20

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

• Espacenet
• Global Dossier
• Discuss

• HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 6
• 229910010271 silicon carbide Inorganic materials 0.000 claims description 6
• 239000013078 crystal Substances 0.000 claims description 4
• 239000002994 raw material Substances 0.000 claims description 4
• 239000000758 substrate Substances 0.000 claims description 2
• OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 2
• 229910002804 graphite Inorganic materials 0.000 claims 2
• 239000010439 graphite Substances 0.000 claims 2
• 238000010438 heat treatment Methods 0.000 claims 2
• 230000008022 sublimation Effects 0.000 claims 1
• 238000000859 sublimation Methods 0.000 claims 1

Cited By (1)