JPS6255559U - - Google Patents
Info
- Publication number
- JPS6255559U JPS6255559U JP14733485U JP14733485U JPS6255559U JP S6255559 U JPS6255559 U JP S6255559U JP 14733485 U JP14733485 U JP 14733485U JP 14733485 U JP14733485 U JP 14733485U JP S6255559 U JPS6255559 U JP S6255559U
- Authority
- JP
- Japan
- Prior art keywords
- film
- chamber
- unwinding
- roll coater
- sputtering device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004544 sputter deposition Methods 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 3
- 238000005192 partition Methods 0.000 claims description 3
- 238000004804 winding Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985147334U JPH0230444Y2 (US20030199744A1-20031023-C00003.png) | 1985-09-28 | 1985-09-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985147334U JPH0230444Y2 (US20030199744A1-20031023-C00003.png) | 1985-09-28 | 1985-09-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6255559U true JPS6255559U (US20030199744A1-20031023-C00003.png) | 1987-04-06 |
| JPH0230444Y2 JPH0230444Y2 (US20030199744A1-20031023-C00003.png) | 1990-08-16 |
Family
ID=31060599
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985147334U Expired JPH0230444Y2 (US20030199744A1-20031023-C00003.png) | 1985-09-28 | 1985-09-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0230444Y2 (US20030199744A1-20031023-C00003.png) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009013473A (ja) * | 2007-07-05 | 2009-01-22 | Dainippon Printing Co Ltd | 薄膜形成装置および薄膜形成方法 |
| JP2011153340A (ja) * | 2010-01-26 | 2011-08-11 | Fuji Electric Co Ltd | 可撓性基板の処理装置 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5809070B2 (ja) * | 2012-01-11 | 2015-11-10 | クラレファスニング株式会社 | 面ファスナーを有する積層体及びその製造方法 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59173266A (ja) * | 1983-03-23 | 1984-10-01 | Fuji Photo Film Co Ltd | 薄膜形成装置 |
| JPS59173267A (ja) * | 1983-03-23 | 1984-10-01 | Fuji Photo Film Co Ltd | 薄膜形成装置 |
| JPS6067671A (ja) * | 1983-09-24 | 1985-04-18 | Anelva Corp | 薄膜作成装置 |
-
1985
- 1985-09-28 JP JP1985147334U patent/JPH0230444Y2/ja not_active Expired
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59173266A (ja) * | 1983-03-23 | 1984-10-01 | Fuji Photo Film Co Ltd | 薄膜形成装置 |
| JPS59173267A (ja) * | 1983-03-23 | 1984-10-01 | Fuji Photo Film Co Ltd | 薄膜形成装置 |
| JPS6067671A (ja) * | 1983-09-24 | 1985-04-18 | Anelva Corp | 薄膜作成装置 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009013473A (ja) * | 2007-07-05 | 2009-01-22 | Dainippon Printing Co Ltd | 薄膜形成装置および薄膜形成方法 |
| JP2011153340A (ja) * | 2010-01-26 | 2011-08-11 | Fuji Electric Co Ltd | 可撓性基板の処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0230444Y2 (US20030199744A1-20031023-C00003.png) | 1990-08-16 |
