JPS6254658A - Transport device - Google Patents
Transport deviceInfo
- Publication number
- JPS6254658A JPS6254658A JP19106285A JP19106285A JPS6254658A JP S6254658 A JPS6254658 A JP S6254658A JP 19106285 A JP19106285 A JP 19106285A JP 19106285 A JP19106285 A JP 19106285A JP S6254658 A JPS6254658 A JP S6254658A
- Authority
- JP
- Japan
- Prior art keywords
- transport
- product
- transport mechanism
- conveyance
- bogie
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Feeding Of Workpieces (AREA)
- Multi-Process Working Machines And Systems (AREA)
- Intermediate Stations On Conveyors (AREA)
- Specific Conveyance Elements (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は半導体集積回路の加工物を搬送する搬送装置に
係シ、特に第2の搬送機構を通シプロセス処理装置へ搬
送するのに要するまち時間が第1の搬送機構へ影響され
ない様に改良された搬送装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a transport device for transporting a workpiece of a semiconductor integrated circuit, and in particular, the present invention relates to a transport device for transporting a workpiece of a semiconductor integrated circuit. The present invention relates to a conveying device that is improved so that the waiting time is not affected by the first conveying mechanism.
生産システムは一連の加工を行なうプロセス処理装置を
群としてこの複数のプロセス処理装置から構成する事が
多い。ここでプロセス処理装置群内の個々の装置に関し
ては処理能力に応じた変化のある搬送量が求められるが
、プロセス処理装置群間の搬送は無駄のない効率の良い
搬送が必要である。A production system is often composed of a plurality of process processing apparatuses grouped together to perform a series of processing operations. Here, a conveyance amount that varies depending on the processing capacity is required for each individual device within a group of process treatment devices, but efficient conveyance without waste is required for transportation between groups of process treatment devices.
加工物のまち時間に代表される無駄な時間を低減し、効
率の良い搬送を行なうには、プロセス処理装置群間を大
量に搬送する第1の搬送機構と、個々のプロセス処理装
置へ小量搬送する第2の搬送機構との混在した搬送シス
テムを実現させ、これを適切に制御する事が重要である
。In order to reduce wasted time represented by waiting time for workpieces and to carry out efficient transport, the first transport mechanism transports large quantities between processing equipment groups, and the first transport mechanism transports small quantities to individual processing equipment. It is important to realize a conveyance system that includes a second conveyance mechanism and to appropriately control this.
半導体産業の生産システムの形態は同様な種類の機能や
性能をもつプロセス処理装置をグループにまとめて配置
する様な形態、いわゆるジョブショップ型が採用されて
いる。The production system in the semiconductor industry adopts a so-called job shop type, in which process processing equipment with similar types of functions and performance are arranged in groups.
従来、この様な環境下での搬送装置は高価なりリーンル
ーム内のフロア−の有効活用等を考慮すると、例えば第
2図に示す様にプロセス処理装置3の頭上の空間に第1
の搬送機構1を設置し、搬送の順序としては第1の搬送
機構1から第2の搬送機構2に移載され、プロセス処理
装置3へ搬送される。Conventionally, the transfer equipment used in such an environment is expensive, and considering the effective use of the floor in the lean room, for example, as shown in FIG.
A conveyance mechanism 1 is installed, and the conveyance order is from the first conveyance mechanism 1 to the second conveyance mechanism 2, and then conveyed to the process processing apparatus 3.
そして、この時の第1の搬送機構1から第2の搬送機構
への移載の手段としては、第3図に示す様に搬送台車4
は第1の搬送機構1の底部に敷設゛されたレール5a、
5bの上部に設置され走行する。At this time, as a means of transferring from the first transport mechanism 1 to the second transport mechanism, a transport carriage 4 is used as shown in FIG.
are the rails 5a laid at the bottom of the first transport mechanism 1;
It is installed on the top of 5b and runs.
そして第2の搬送機構のリフター6が上下する部分には
レール5a 、 5bが敷設されておらず、このレール
5a、 5bに接続させる他のレール5c 、 5dが
リフター6に敷設されており、第2の搬送機構2に移載
を行うには、リフター6を上昇させて5c、5dとレー
ル5a、5bとを接続してから、搬送台車4をレール5
c、5dまで移送し、次にリフター6を下降して第2の
搬送機構2への移載を行っていた。Rails 5a and 5b are not laid in the part where the lifter 6 of the second transport mechanism moves up and down, and other rails 5c and 5d connected to these rails 5a and 5b are laid on the lifter 6. In order to transfer the load to the transport mechanism 2 of No. 2, lifter 6 is raised and 5c, 5d are connected to rails 5a, 5b, and then transport vehicle 4 is moved to rail 5.
c and 5d, and then the lifter 6 was lowered and transferred to the second transport mechanism 2.
上述した従来の搬送装置は第2の搬送機構へ集積回路の
加工物を移載し搬送中には第1の搬送機構内の移載エリ
ア分のレールが存在しないため、まち時間として第1の
搬送機構内に存在する後続搬送台車はそれ以降のプロセ
ス処理装置へ一時期搬送不可能になる。The above-mentioned conventional transfer device transfers the integrated circuit workpiece to the second transfer mechanism, and during the transfer, there are no rails for the transfer area in the first transfer mechanism, so the wait time is limited to the first one. The subsequent conveyance vehicle existing in the conveyance mechanism becomes unable to be conveyed to subsequent processing equipment for a period of time.
従って、第2の搬送機構の、半導体集積回路の加工物の
搬送時間が第1の搬送機構においてはまち時間となシ、
それが全て直列で搬送するシステム構成になっているた
め、1台の第2の搬送機構の搬送時間が台数分だけ約累
積され、全体の搬送量が著しく低下するという欠点があ
る。Therefore, the time taken by the second transport mechanism to transport the workpiece of the semiconductor integrated circuit is not the waiting time in the first transport mechanism.
Since the system configuration is such that all of them are conveyed in series, there is a drawback that the conveyance time of one second conveyance mechanism is approximately accumulated by the number of second conveyance mechanisms, and the total conveyance amount is significantly reduced.
本発明は前記問題点を解消するもので、第1の搬送機構
のまち時間を縮小し、全体の搬送量を著しく向上させる
搬送装置を提供するものである。The present invention solves the above-mentioned problems and provides a conveyance device that reduces the waiting time of the first conveyance mechanism and significantly improves the overall conveyance amount.
本発明は複数のジョブショップ型のプロセス処理装置群
間で半導体集積回路の加工物を複数の台車に搭載してこ
れを大量搬送する第1の搬送機構と、前記台車よりそれ
ぞれ半導体集積回路の加工物を上下するリフターにて受
取りこれを各プロセス処理装置に個別に小量搬送する第
2の搬送機構からなる搬送装置において、前記第1の搬
送機構の垂直壁に台車走行用レールを敷設し、該レール
に保持された加工物搭載用搬送台車の底部を開放し、該
搬送台車内に半導体集積回路の加工物を吊架したことを
特徴とする搬送装置である。The present invention provides a first transport mechanism that loads semiconductor integrated circuit workpieces on a plurality of trolleys and transports them in large quantities between a plurality of job shop-type process processing equipment groups, and a first transport mechanism that transports semiconductor integrated circuit workpieces in large quantities between a plurality of job shop-type process processing equipment groups, and In a transport device consisting of a second transport mechanism that receives objects by a lifter that moves up and down and transports the objects individually in small amounts to each processing device, a rail for running a trolley is laid on a vertical wall of the first transport mechanism, This conveyance device is characterized in that the bottom of a workpiece loading conveyance vehicle held by the rail is open, and a semiconductor integrated circuit workpiece is suspended within the conveyance vehicle.
次に本発明の一実施例について図面を参照して説明する
。第1図において、第1の搬送機構1の内部の搬送台車
4は第1の搬送機構1の垂直壁1aに敷設したレール5
a、5bによって走行し半導体集積回路の加工物7は搬
送台車4に取り付けられている吊り下げ棒8により保持
され、搬送台車4の底部4aは開放されている。第2の
搬送機構2の内部のリフター6は第1の搬送機構から受
は取った半導体集積回路の加工物7を第2搬送機構2で
搬送させる為のものである。Next, an embodiment of the present invention will be described with reference to the drawings. In FIG. 1, a transport vehicle 4 inside the first transport mechanism 1 is connected to a rail 5 installed on a vertical wall 1a of the first transport mechanism 1.
The workpiece 7, which is a semiconductor integrated circuit, is held by a hanging rod 8 attached to the carriage 4, and the bottom 4a of the carriage 4 is open. The lifter 6 inside the second transport mechanism 2 is used to transport the semiconductor integrated circuit workpiece 7 received from the first transport mechanism by the second transport mechanism 2.
実施例において、半導体集積回路の加工物7を積載した
搬送台車4が移載エリアに到着すると、待機していたリ
フター6が搬送台車4の開放した底部4aよシ台車内部
まで上昇し半導体集積回路の加工物7のみをすくい上げ
吊り下げ棒8を解除して第2の搬送機構2へ搬送して行
く。なおリフターの上昇下降する機構は従来と同様に行
なわれる。In the embodiment, when the transport vehicle 4 loaded with semiconductor integrated circuit workpieces 7 arrives at the transfer area, the lifter 6 that has been waiting rises to the interior of the transport vehicle through the open bottom 4a of the transport vehicle 4 and removes the semiconductor integrated circuits. Only the workpiece 7 is scooped up, the hanging rod 8 is released, and the workpiece 7 is transported to the second transport mechanism 2. The mechanism for raising and lowering the lifter is the same as the conventional one.
当然の事ながらプロセス処理装置の搬出側の搬送方法に
おいても上記した方法の逆の手順を実施することによシ
実施できる。Naturally, the transfer method on the unloading side of the process processing apparatus can also be carried out by performing the reverse procedure of the above method.
以上説明した様に本発明は搬送量の異なる2つの搬送機
構間の積載対象物を半導体集積回路の加工物に限定し、
第1の搬送機構の搬送台車は常に走行可能な状態にする
ことによシ、第2の搬送機構の搬送時間に代表される待
ち時間がなくなり、搬送量を低下させずに安定した搬送
を行なうことができる効果がある。As explained above, the present invention limits the objects to be loaded between two transport mechanisms with different transport amounts to semiconductor integrated circuit workpieces,
By keeping the transport vehicle of the first transport mechanism in a running state at all times, the waiting time represented by the transport time of the second transport mechanism is eliminated, and stable transport is performed without reducing the transport amount. There is an effect that can be done.
第1図は本発明に係る搬送装置の一実施例を示す立体図
、第2図は従来の搬送装置を示す立体図、第3図は第2
図の部分的な拡大立体図である。
1・・・第1の搬送機構、2・・・第2の搬送機構、3
・・・プロセス処理装置、4・・・搬送台車、5a、b
、c、d・・・レール、6・・・リフター、7・・・半
導体集積回路の加工物、8・・・吊り下げ棒。
第1図
第2図FIG. 1 is a three-dimensional diagram showing an embodiment of the conveying device according to the present invention, FIG. 2 is a three-dimensional diagram showing a conventional conveying device, and FIG.
It is a partially enlarged three-dimensional view of the figure. 1... First transport mechanism, 2... Second transport mechanism, 3
...Process processing device, 4...Transportation truck, 5a, b
, c, d...Rail, 6...Lifter, 7...Semiconductor integrated circuit workpiece, 8...Hanging rod. Figure 1 Figure 2
Claims (1)
で半導体集積回路の加工物を複数の台車に搭載してこれ
を大量搬送する第1の搬送機構と、前記台車よりそれぞ
れ半導体集積回路の加工物を上下するリフターにて受取
りこれを各プロセス処理装置に個別に小量搬送する第2
の搬送機構からなる搬送装置において、前記第1の搬送
機構の垂直壁に台車走行用レールを敷設し、該レールに
保持された加工物搭載用搬送台車の底部を開放し、該搬
送台車内に半導体集積回路の加工物を吊架したことを特
徴とする搬送装置。(1) A first transport mechanism that loads semiconductor integrated circuit workpieces on a plurality of trolleys and transports them in large quantities between a plurality of job shop-type processing equipment groups, and processes semiconductor integrated circuits from the respective trolleys. The second part receives the items with the lifter that moves up and down and transports them individually in small quantities to each processing equipment.
In the conveyance device, a conveyance mechanism includes a conveyance mechanism, in which a trolley running rail is laid on the vertical wall of the first conveyance mechanism, the bottom of the workpiece loading conveyance car held by the rail is opened, and a A transport device characterized by suspending a workpiece of a semiconductor integrated circuit.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19106285A JPS6254658A (en) | 1985-08-30 | 1985-08-30 | Transport device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19106285A JPS6254658A (en) | 1985-08-30 | 1985-08-30 | Transport device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6254658A true JPS6254658A (en) | 1987-03-10 |
Family
ID=16268249
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19106285A Pending JPS6254658A (en) | 1985-08-30 | 1985-08-30 | Transport device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6254658A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03259812A (en) * | 1990-03-09 | 1991-11-19 | Mitsubishi Electric Corp | Automatic carrying device and method |
US6178523B1 (en) * | 1998-06-12 | 2001-01-23 | Philips Consumer Communications Lp | Battery-operated device with power failure recovery |
-
1985
- 1985-08-30 JP JP19106285A patent/JPS6254658A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03259812A (en) * | 1990-03-09 | 1991-11-19 | Mitsubishi Electric Corp | Automatic carrying device and method |
US6178523B1 (en) * | 1998-06-12 | 2001-01-23 | Philips Consumer Communications Lp | Battery-operated device with power failure recovery |
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