JPS6254658A - Transport device - Google Patents

Abstract

PURPOSE:To eliminate waiting time in a transport device for an IC product and the like by opening the bottom of a transport bogie held to rails on the vertical wall of a primary transport mechanism and handing the product therein. CONSTITUTION:A bogie 4 in a primary transport mechanism 1 travels on rails 5a and 5b laid on a vertical wall 1a and hangs a semiconductor product 7 of IC on a hanging bar 8 with the product bottom 4a open. When the bogie 4 loaded with the product 7 has arrived at a transshipment area, a lifter 6 within a waiting secondary transport mechanism 2 rises inward through the open bottom 4a of the bogie 4, scoops only the product 7, releases the hanging bar 8 and carries the product 7 to the secondary transport mechanism 2. The bogie kept so movable at all times eliminates the waiting time of the secondary transport mechanism and ensures stable product transport without any drop in transporting quantity.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a transport device for transporting a workpiece of a semiconductor integrated circuit, and in particular, the present invention relates to a transport device for transporting a workpiece of a semiconductor integrated circuit. The present invention relates to a conveying device that is improved so that the waiting time is not affected by the first conveying mechanism.

[Conventional technology]

A production system is often composed of a plurality of process processing apparatuses grouped together to perform a series of processing operations. Here, a conveyance amount that varies depending on the processing capacity is required for each individual device within a group of process treatment devices, but efficient conveyance without waste is required for transportation between groups of process treatment devices.

In order to reduce wasted time represented by waiting time for workpieces and to carry out efficient transport, the first transport mechanism transports large quantities between processing equipment groups, and the first transport mechanism transports small quantities to individual processing equipment. It is important to realize a conveyance system that includes a second conveyance mechanism and to appropriately control this.

The production system in the semiconductor industry adopts a so-called job shop type, in which process processing equipment with similar types of functions and performance are arranged in groups.

Conventionally, the transfer equipment used in such an environment is expensive, and considering the effective use of the floor in the lean room, for example, as shown in FIG.
A conveyance mechanism 1 is installed, and the conveyance order is from the first conveyance mechanism 1 to the second conveyance mechanism 2, and then conveyed to the process processing apparatus 3.

At this time, as a means of transferring from the first transport mechanism 1 to the second transport mechanism, a transport carriage 4 is used as shown in FIG.
are the rails 5a laid at the bottom of the first transport mechanism 1;
It is installed on the top of 5b and runs.

Rails 5a and 5b are not laid in the part where the lifter 6 of the second transport mechanism moves up and down, and other rails 5c and 5d connected to these rails 5a and 5b are laid on the lifter 6. In order to transfer the load to the transport mechanism 2 of No. 2, lifter 6 is raised and 5c, 5d are connected to rails 5a, 5b, and then transport vehicle 4 is moved to rail 5.
c and 5d, and then the lifter 6 was lowered and transferred to the second transport mechanism 2.

[Problem that the invention seeks to solve]

The above-mentioned conventional transfer device transfers the integrated circuit workpiece to the second transfer mechanism, and during the transfer, there are no rails for the transfer area in the first transfer mechanism, so the wait time is limited to the first one. The subsequent conveyance vehicle existing in the conveyance mechanism becomes unable to be conveyed to subsequent processing equipment for a period of time.

Therefore, the time taken by the second transport mechanism to transport the workpiece of the semiconductor integrated circuit is not the waiting time in the first transport mechanism.
Since the system configuration is such that all of them are conveyed in series, there is a drawback that the conveyance time of one second conveyance mechanism is approximately accumulated by the number of second conveyance mechanisms, and the total conveyance amount is significantly reduced.

The present invention solves the above-mentioned problems and provides a conveyance device that reduces the waiting time of the first conveyance mechanism and significantly improves the overall conveyance amount.

[Failure to solve the problem]

The present invention provides a first transport mechanism that loads semiconductor integrated circuit workpieces on a plurality of trolleys and transports them in large quantities between a plurality of job shop-type process processing equipment groups, and a first transport mechanism that transports semiconductor integrated circuit workpieces in large quantities between a plurality of job shop-type process processing equipment groups, and In a transport device consisting of a second transport mechanism that receives objects by a lifter that moves up and down and transports the objects individually in small amounts to each processing device, a rail for running a trolley is laid on a vertical wall of the first transport mechanism, This conveyance device is characterized in that the bottom of a workpiece loading conveyance vehicle held by the rail is open, and a semiconductor integrated circuit workpiece is suspended within the conveyance vehicle.

〔Example〕

Next, an embodiment of the present invention will be described with reference to the drawings. In FIG. 1, a transport vehicle 4 inside the first transport mechanism 1 is connected to a rail 5 installed on a vertical wall 1a of the first transport mechanism 1.
The workpiece 7, which is a semiconductor integrated circuit, is held by a hanging rod 8 attached to the carriage 4, and the bottom 4a of the carriage 4 is open. The lifter 6 inside the second transport mechanism 2 is used to transport the semiconductor integrated circuit workpiece 7 received from the first transport mechanism by the second transport mechanism 2.

In the embodiment, when the transport vehicle 4 loaded with semiconductor integrated circuit workpieces 7 arrives at the transfer area, the lifter 6 that has been waiting rises to the interior of the transport vehicle through the open bottom 4a of the transport vehicle 4 and removes the semiconductor integrated circuits. Only the workpiece 7 is scooped up, the hanging rod 8 is released, and the workpiece 7 is transported to the second transport mechanism 2. The mechanism for raising and lowering the lifter is the same as the conventional one.

Naturally, the transfer method on the unloading side of the process processing apparatus can also be carried out by performing the reverse procedure of the above method.

〔Effect of the invention〕

As explained above, the present invention limits the objects to be loaded between two transport mechanisms with different transport amounts to semiconductor integrated circuit workpieces,
By keeping the transport vehicle of the first transport mechanism in a running state at all times, the waiting time represented by the transport time of the second transport mechanism is eliminated, and stable transport is performed without reducing the transport amount. There is an effect that can be done.

[Brief explanation of the drawing]

FIG. 1 is a three-dimensional diagram showing an embodiment of the conveying device according to the present invention, FIG. 2 is a three-dimensional diagram showing a conventional conveying device, and FIG.
It is a partially enlarged three-dimensional view of the figure. 1... First transport mechanism, 2... Second transport mechanism, 3
...Process processing device, 4...Transportation truck, 5a, b
, c, d...Rail, 6...Lifter, 7...Semiconductor integrated circuit workpiece, 8...Hanging rod. Figure 1 Figure 2

Claims (1)

[Claims] (1) A first transport mechanism that loads semiconductor integrated circuit workpieces on a plurality of trolleys and transports them in large quantities between a plurality of job shop-type processing equipment groups, and processes semiconductor integrated circuits from the respective trolleys. The second part receives the items with the lifter that moves up and down and transports them individually in small quantities to each processing equipment.
In the conveyance device, a conveyance mechanism includes a conveyance mechanism, in which a trolley running rail is laid on the vertical wall of the first conveyance mechanism, the bottom of the workpiece loading conveyance car held by the rail is opened, and a A transport device characterized by suspending a workpiece of a semiconductor integrated circuit.