JPS6254287U - - Google Patents
Info
- Publication number
- JPS6254287U JPS6254287U JP14511285U JP14511285U JPS6254287U JP S6254287 U JPS6254287 U JP S6254287U JP 14511285 U JP14511285 U JP 14511285U JP 14511285 U JP14511285 U JP 14511285U JP S6254287 U JPS6254287 U JP S6254287U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum pump
- pedestal
- evacuation
- piping
- unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14511285U JPS6254287U (en, 2012) | 1985-09-25 | 1985-09-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14511285U JPS6254287U (en, 2012) | 1985-09-25 | 1985-09-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6254287U true JPS6254287U (en, 2012) | 1987-04-03 |
Family
ID=31056347
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14511285U Pending JPS6254287U (en, 2012) | 1985-09-25 | 1985-09-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6254287U (en, 2012) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011226367A (ja) * | 2010-04-19 | 2011-11-10 | Ebara Corp | ドライ真空ポンプ装置 |
-
1985
- 1985-09-25 JP JP14511285U patent/JPS6254287U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011226367A (ja) * | 2010-04-19 | 2011-11-10 | Ebara Corp | ドライ真空ポンプ装置 |